Embedded MEMS-based concentration sensor for fuel cell and biofuel applications

Sparks, D.; Kawaguchi, Kenichi; Yasuda, Masashi; Riley, D. S.; Cruz, V.; Tran, Nam Nghiep; Chimbayo, A.; Najafi, Nader

doi:10.1016/j.sna.2007.10.015

Cited by 28 publications

(11 citation statements)

References 15 publications

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“…The commercially available sensors are shown in Figure 1. The large microfluidic resonator chip (middle) and packaged device (top middle) [4,10,11] uses a resonating silicon tube that is vacuum sealed with reflowed glass. All of these resonators employed thin film getters to obtain low initial, cavity pressures (1 mTorr).…”

Section: Methodsmentioning

confidence: 99%

Output Drifting of Vacuum Packaged MEMS Sensors Due to Room Temperature Helium Exposure

Sparks¹,

Mitchell²,

Lee³

2013

JST

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Exposure of absolute pressure sensors, resonant microtube density, binary concentration sensors and chip-scale vacuum packaged pirani gauges to room temperature helium resulted in a gradual drift in sensor output. No effect was found for differential pressure sensors and pirani gauges vacuum packaged with ceramic or metal packages. The observed results apply to other vacuum packaged MEMS devices such as gyroscopes, voltage controlled oscillators, infrared and Coriolis mass flow sensors. Potential causes for this loss of hermeticity are discussed as well as application limitations for MEMS sensors.

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Section: Methodsmentioning

confidence: 99%

Output Drifting of Vacuum Packaged MEMS Sensors Due to Room Temperature Helium Exposure

Sparks¹,

Mitchell²,

Lee³

2013

JST

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“…Besides sensors that are integrated into miniature bioreactors, other available micro-sensors can be used. Examples are MEMS-based chemical concentration sensors [ 65 ], gold-plated microscopic electrode needle arrays [ 66 ] and miniaturized gas sensors [ 67 ].…”

Section: Miniaturizationmentioning

confidence: 99%

Miniaturization and 3D Printing of Bioreactors: A Technological Mini Review

et al. 2020

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Many articles have been published on scale-down concepts as well as additive manufacturing techniques. However, information is scarce when miniaturization and 3D printing are applied in the fabrication of bioreactor systems. Therefore, garnering information for the interfaces between miniaturization and 3D printing becomes important and essential. The first goal is to examine the miniaturization aspects concerning bioreactor screening systems. The second goal is to review successful modalities of 3D printing and its applications in bioreactor manufacturing. This paper intends to provide information on anaerobic digestion process intensification by fusion of miniaturization technique and 3D printing technology. In particular, it gives a perspective on the challenges of 3D printing and the options of miniature bioreactor systems for process high-throughput screening.

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“…In other approaches, for example, density or the electronic influence of the fluid on the gate of a high electron mobility transistor is used for signal generation. The devices are yet rather complex compared to the presented PhC sensor.…”

Section: Introductionmentioning

confidence: 99%

Photonic crystal‐based fluid sensors: Toward practical application

Amrehn

Schumacher

et al. 2015

Physica Status Solidi (a)

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We present an uncomplicated and inexpensive system for refractive index measurements of fluids based on the optical properties of photonic crystals (PhCs). The photonic band gap of inverse opals depends on the refractive index contrast between the crystal and the pore fluid. A change of refractive index of the pore fluid causes variations in the photonic band gap which can be observed as change in the wavelength of reflected light of the crystal (color change). Based on this principle a measurement cell for continuous fluid measurements was build (see figure) and used for identification of water/ethanol mixtures. Based on photonic band structure simulations general rules/recommendations for the design of this sensor type are given, for example, periodicity of the inverse opal, choice of material (refractive index), or measurement mode. For the proof of concept tungsten oxide (WO3) inverse opal structure was utilized as sensing layer. However, depending on the application other metal oxides or even polymers can be used. With the presented method a limit of detection (LoD) of 0.001 refractive index unit (RIU) was achieved. The figure shows the cross section of the custom built measurement cell: the reflectivity of the WO3 inverse opal (round image, left) is measured by a spectrometer in dependence of the fluid in contact to the crystal. Different refractive indices of the fluids cause spectral shifts of the reflection peak (right graph).

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Embedded MEMS-based concentration sensor for fuel cell and biofuel applications

Cited by 28 publications

References 15 publications

Output Drifting of Vacuum Packaged MEMS Sensors Due to Room Temperature Helium Exposure

Output Drifting of Vacuum Packaged MEMS Sensors Due to Room Temperature Helium Exposure

Miniaturization and 3D Printing of Bioreactors: A Technological Mini Review

Photonic crystal‐based fluid sensors: Toward practical application

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