Elliptic Vector Loci of Average Electron Velocity in Real Gases Under AC Electric and DC Magnetic Fields

Nakata, Yuya; Sato, Takeshi; Sugawara, Hirotake

doi:10.1109/tps.2020.3010315

Cited by 2 publications

(8 citation statements)

References 48 publications

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“…The CCF model ignores the temporal variation of ν which would occur in real gases. Thus, under E(t) ̸ ⊥ B as well, characteristics of W(t) in a real gas originating in its electron collision cross sections would appear in the deviation of W(t) from the elliptic vector loci predicted by the CCF model through ν as demonstrated under E(t) ⊥ B [51].…”

Section: It Is Common For W Bmentioning

confidence: 97%

“…However, real gases do not necessarily t the CCF model, especially in case the εdependence of q total is complicated in the presence of inelastic processes with thresholds. A rough prospect for the CCF feature of a gas could be given by observing the variation width of N q total v for the gas in a main range of ε to which the majority of electrons in the swarm belong [51].…”

Section: Electronmolecule Interactionsmentioning

confidence: 99%

“…Compared with a specic case θ = π/2 presented in [48,49,51], it is seen in ( 14) (16) that W B x (t) and W B y (t) have the same dependence on the parameters except for an additional factor sin θ and that where v 1eV is the electron speed associated with 1 eV. The parallelograms are the intersections between the cube and the vector planes including the elliptic vector loci non-zero with a factor of cos θ for θ ̸ = π/2.…”

Section: Dependence Of W(t) On the Parametersmentioning

confidence: 99%

“…The basic behavior of the elliptic vector locus observed in Ar was reproduced also in the constant-collision-frequency (CCF) model. This CCF model is much simpler than most of the real gases, but an example of real gas close to the CCF model to some extent has been reported [50,51]; an electron collision cross section set of F 2 [52,53] has an energy range in which the total collision frequency does not change signicantly.…”

Section: Introductionmentioning

confidence: 99%

“…A CCF model gas is a characterless medium in the sense that the dependence of ν on the electron energy does not appear. Thus, the analytic solution of W(t) in the CCF model has a possibility to be a benchmark for characterizing the electron transport in real gases [51]. Details of the W(t) derivation are described, and some properties of W(t) in the CCF model are dis-…”

Section: Introductionmentioning

confidence: 99%

See 4 more Smart Citations

Elliptic vector loci of average electron velocity of electron swarm in constant-collision-frequency model gas under ac electric and dc magnetic fields crossed at arbitrary angles

Sugawara

Nakata

2022

Eur. Phys. J. D

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The analytic solution of the average electron velocity vector W(t) of an electron swarm in gas under ac electric and dc magnetic elds (E(t) and B, respectively) in a constant-collision-frequency model is extended to cover not only the known case of a right crossing angle (E(t) ⊥ B) but also the cases of arbitrary crossing angles (E(t) ̸ ⊥ B). The x, y, and z components of W(t) are obtained as explicit formulae with the following parameters: the amplitude E of E(t), the angle θ between E(t) and B, the angular frequency ω E of E(t), the cyclotron angular frequency ω B (subject to the strength B of B), and the electron collision frequency ν. A basic feature that W(t) draws elliptic locus in velocity space is unchanged even under E(t) ̸ ⊥ B, but the plane including the locus may tilt when ω E , ω B , or ν varies. The derivation of W(t) based on the analytic solution of single electron motion is detailed and fundamental behavior of the W(t) loci is observed to understand the electron transport under E(t) × B elds.

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Section: It Is Common For W Bmentioning

confidence: 97%

Section: Electronmolecule Interactionsmentioning

confidence: 99%

Section: Dependence Of W(t) On the Parametersmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Elliptic vector loci of average electron velocity of electron swarm in constant-collision-frequency model gas under ac electric and dc magnetic fields crossed at arbitrary angles

Sugawara

Nakata

2022

Eur. Phys. J. D

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Science-based, data-driven developments in plasma processing for material synthesis and device-integration technologies

Kambara

Kawaguchi

Lee

et al. 2022

Jpn. J. Appl. Phys.

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Low-temperature plasma processing technologies is essential for material synthesis, device fabrication, and surface treatment. The development of plasma-related products and services requires an understanding of the multiscale complex behaviors of plasma and the hierarchical integration of plasma generation, energy and mass transports through sheath region, surface reactions, and other processes. The importance of science-based and data-driven approaches to controlling systems is argued. The state-of-the-art of deep learning, machine learning, and artificial intelligence in low-temperature plasma science and technology is reviewed. In this review, the requirements and challenges for plasma parameter prediction and processing recipe discovery are asserted by researchers in the fields of material science and plasma processing. It also outlined a science-based, data-driven approach for development of virtual metrology in plasma processes.

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Elliptic Vector Loci of Average Electron Velocity in Real Gases Under AC Electric and DC Magnetic Fields

Cited by 2 publications

References 48 publications

Elliptic vector loci of average electron velocity of electron swarm in constant-collision-frequency model gas under ac electric and dc magnetic fields crossed at arbitrary angles

Elliptic vector loci of average electron velocity of electron swarm in constant-collision-frequency model gas under ac electric and dc magnetic fields crossed at arbitrary angles

Science-based, data-driven developments in plasma processing for material synthesis and device-integration technologies

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