III-N Distributed Bragg Reflectors (DBRs) are important components to nitride based optoelectronic devices. Nitride based DBRs are critical to the operation and performance of both Vertical Cavity Surface Emitting Lasers (VCSELs) and Light Emitting Diodes (LEDs). Aluminum Nitride (AlN)/Gallium Nitride DBRs are of particular interest because their high refractive index contrast allows the fabrication of DBRs with high reflectivity using a relatively low number of periods. The growth of high quality AlN/GaN DBRs has been held back because of tensile strain resulting from the 2.4% lattice mismatch between AlN and GaN. This tensile strain has led to cracking in DBRs and has significantly decreased their overall reflectivity. Reducing this strain and subsequent cracking is critical to improving AlN/GaN DBR reflectivity and the overall efficiency of nitride based optoelectronic devices. This work will focus on the characterization, simulation, and development of AlN/GaN DBRs. Individual AlN and GaN thin films will be characterized to determine their properties and promise for development DBR structures. AlN/GaN DBR structures will then be characterized and simulated to determine their overall performance. Finally, the effect of strain on both the apparent refractive index of individual layers and the overall performance of AlN/GaN DBRs will be investigated. iii ACKNOWLEDGMENTS I would like to first thank my parents, Joseph and Phyllis Miller, whose hard work and support made my collegiate career possible. I would like to thank my advisor and committee chair, Dr. Dimitris Korakakis, for his encouragement, guidance, and funding throughout my entire graduate and much of my undergraduate career. I would like to thank my committee members, Dr. Lawrence A. Hornak and Dr. Xian-An Cao, for all the time and support they have contributed to this work. I would like to thank Dr. Kolin Brown for his help in learning and maintaining lab equipment. Finally, I would like to thank Lee Rodak, Ronak Rahimi, Srikanth Raghavan, John Harman, Joshua Nightingale, Rich Farrell, Adam Kabulski, Vincent Pagán, and my other coworkers for their support of this work as well as other projects I have worked on during my undergraduate and graduate studies.