Elimination of spurious modes in zinc oxide micro-resonators by optimizing structure parameters

Abstract

The design, simulation, fabrication and test results of micro-resonators integrating piezoelectric zinc oxide (ZnO) layers are reported in this paper. Interdigitated electrodes are used to excite the thin piezoelectric layer. These micro-resonators are built on top of 2μm silicon membranes of SOI wafers. To improve the quality factor Q and the electromechanical coupling coefficient kt 2 of the proposed devices different numbers and different lengths of inter-digitated (IDTs) electrodes have been tested.