Recently,
Ga2O3-based self-powered ultraviolet
photodetectors have aroused great interest due to their potential
applications in civil, medical, and environmental monitoring fields.
So far, most p–n junction photodetectors are fabricated with
p-type semiconductors like GaN and SiC, which are usually nonoxide
materials. As a result, the p-type semiconductors are oxidized and
the conductive properties degenerated when constructing a p–n
junction with the Ga2O3 thin film at a high
growth temperature. In this work, we chose the oxide NiO as the p-type
material and used radio-frequency reactive magnetron sputtering system
to fabricate the all-oxide NiO/Ga2O3 p–n
junction at room temperature and manufacture the self-powered UV photodetector.
Thanks to the type II band alignment, the photodetector exhibits a
responsivity (R) of 57 μA/W, a detectivity
(D*) of 5.45 × 109 jones, and an I
light/I
dark ratio
of 122 when exposed to a 254 nm light irradiation at 0 V. In addition,
the photodetector based on the all-oxide NiO/Ga2O3 p–n junction shows good stability and reproducibility in
air, oxygen, and vacuum. Our results provide an inexpensive and suitable
pathway for the mass production of self-powered UV photodetectors.