Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type

Tsai, Cheng-Hua; Tsai, Chun‐Wei; Chang, Hsu-Tang; Liu, Shih-Hsiang; Tsai, Jui-che

doi:10.3390/s150614745

Cited by 15 publications

(6 citation statements)

References 28 publications

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“…Electrothermal microactuators have been widely used in designs of microelectromechanical systems (MEMS) for various applications due to their virtues of compatibility, stability, and capabilities in producing high forces and large displacements at lower actuation voltages [1][2][3][4][5]. Among various configurations of the electrothermal actuators, the U-shaped [6,7], V-shaped [8][9][10], and Z-shaped [11,12] types are three typical types to produce in-plane motions.…”

Section: Introductionmentioning

confidence: 99%

“…(4) Currently, analysis on output displacement and force is conducted separately [21,22], which leads to difficulties in designing actuators meeting both displacement and force requirements. (5) Current models provide a limited number of design parameters one can adjust, due to the lack of consideration of the influences of several important parameters such as the central shuttle, the number of pairs of V-shaped or Z-shaped beams, and the position of short beams in Z-shaped beams [11].…”

Section: Introductionmentioning

confidence: 99%

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Closed-form modelling and design analysis of V- and Z-shaped electrothermal microactuators

Zhang

et al. 2016

J. Micromech. Microeng.

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This paper presents the modelling and design analysis of V- and Z-shaped electrothermal microactuators. First, a comprehensive but concise closed-form multiphysical analytical model is developed to predict the output displacement and force of both V- and Z-shaped electrothermal microactuators operating either in vacuum or in air conditions. The analytical model is verified by finite element analysis and experimental testing. Then, a novel comparison benchmark is proposed for the design and analysis of the V- and Z-shaped microactuators. With the multiphysical model and comparison benchmark, comprehensive performance comparison and analysis of the V- and Z-shaped beams are performed with the aim of providing insight and guidance on selection and design of the two typical types of electrothermal microactuators. Finally, the application of the comparison model into the design analysis is demonstrated using a design example of an electrothermal microactuator, and the detailed investigation is conducted to examine the effects of the material properties and structural parameters on the microactuator outputs.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Closed-form modelling and design analysis of V- and Z-shaped electrothermal microactuators

Zhang

et al. 2016

J. Micromech. Microeng.

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“…Determining stress and strain in loaded samples can be accomplished with analytical calculus and numerical or experimental methods [1][2][3][4]. The theoretical determination of stress and strain requires the acceptance of simplified theories on the shape and structure of the element, the mechanical characteristics of the material, and even the loading and support modes [5][6][7].…”

Section: Strains Compounded At Simultaneous Loading On An Axial Tensimentioning

confidence: 99%

Extensometer for Determining Strains on a Tensile and Torsion Simultaneous Load

Goanță

2020

Sensors

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The paper presents an extensometer designed to measure two mechanical strains at the same time—one from tensile load and the other from torsion load. Strain transducers provide different electric signals, which, after calibration, lead to the simultaneous measurement of linear (ε) and angular (γ) strains. Each of these two signals depends on the measured process and is not influenced by the other strain process. This extensometer is designed to be easily mounted on the sample with only two mounting points and can be used to measure the combined cyclical fatigue of tensile and torsional loadings. This extensometer has two bars—one rigid, reported at the resulting stress points, and one elastic and deformable. The elastic deformable bar has two beams with different orientations. When the sample is deformed, both beams are loaded by two bending moments (perpendicular to each other and both perpendicular on the longitudinal axis of the bars).

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“…Instead of mechanical systems, time-resolved studies can be implemented using piezo actuators based on piezoceramics or single crystals. Such actuators and actuator-based systems are commonly used due to their unique characteristics (high speed and wide angular scanning range) as different motors and stages (Morita, 2003;Matsunami et al, 2008), for fast optical beam scanning (Filhol et al, 2005), as beam deflectors (Tsai et al, 2015) or even for time-resolved quick-scanning EXAFS (Richwin et al, 2002).…”

Section: Introductionmentioning

confidence: 99%

Laboratory time-resolved X-ray diffractometry for in situ studies of crystalline materials under uniaxial compression and vibration

Akkuratov¹,

Благов²,

Eliovich³

et al. 2022

J Appl Cryst

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A novel laboratory diffractometer for time-resolved high-resolution X-ray diffraction studies of reversible and irreversible processes in crystalline materials under uniaxial compression and vibration is described. Temporal resolution up to milliseconds for double-crystal and up to tens of seconds for triple-crystal diffraction experiments was achieved with a single adaptive bending X-ray optics element. Design solutions and techniques for applying and controlling uniaxial compression and vibration for in situ time-resolved studies are described. Results are presented for various static and dynamic load experiments, controlled by a system based on the TANGO Controls framework. Rocking curves of paratellurite (TeO2) under quasi-static compression and lithium fluoride (LiF) under ultrasonic vibration were measured with temporal resolution. Reciprocal-space maps of LiF under static compression and quartz (SiO2) under ultrasonic vibration were collected.

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Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type

Cited by 15 publications

References 28 publications

Closed-form modelling and design analysis of V- and Z-shaped electrothermal microactuators

Closed-form modelling and design analysis of V- and Z-shaped electrothermal microactuators

Extensometer for Determining Strains on a Tensile and Torsion Simultaneous Load

Laboratory time-resolved X-ray diffractometry for in situ studies of crystalline materials under uniaxial compression and vibration

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