Electrostatically deflectable polysilicon micromirrors — dynamic behaviour and comparison with the results from FEM modelling with ANSYS

Fischer, Matthias; Giousouf, M.; Schaepperle, Joerg; Eichner, D; Weinmann, Markus; Münch, Waldemar von; Assmus, F.

doi:10.1016/s0924-4247(97)01770-6

Cited by 48 publications

(20 citation statements)

References 9 publications

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“…The pull-in analyses of the electrostatic torsional microactuators have been extensively reported in many literatures [1]- [14], and the analytical models have been derived for the calculation of the pull-in voltage and tilting angle. Degani et al [1]- [3] proposed a pull-in polynomial algebraic equation for the pull-in angle and pull-in voltage of electrostatic actuator.…”

Section: Introductionmentioning

confidence: 99%

Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators

Guo

Zhao

2004

J. Microelectromech. Syst.

139

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The influence of van der Waals (vdW) and Casimir forces on the stability of the electrostatic torsional nanoelectromechanical systems (NEMS) actuators is analyzed in the paper. With the consideration of vdW and Casimir effects, the dependence of the critical tilting angle and pull-in voltage on the sizes of structure is investigated. And the influence of vdW torque is compared with that of Casimir torque. The modified coefficients of vdW and Casimir torques on the pull-in voltage are, respectively, calculated. When the gap is sufficiently small, pull-in can still take place with arbitrary small angle perturbation because of the action of vdW and Casimir torques even if there is not electrostatic torque. And the critical pull-in gaps for two cases are, respectively, derived.[1222]Index Terms-Casimir, electrostatic torsional actuator, M/NEMS, pull-in, van der Waals (vdW).

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Section: Introductionmentioning

confidence: 99%

Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators

Guo

Zhao

2004

J. Microelectromech. Syst.

139

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“…Usual numerical simulation techniques for the nonlinear structure based on the Finite Element Method (FEM) use staggered procedures iterating between the calculating the mechanical responses due to given electrostatic forces and calculating the electric field under a given geometry. When calculating the mechanical responses, the electrostatic force obtained from the electric field is obtained using the geometrical data in the previous iteration stage, and vice versa [3]. In general, the electrostatic field distributions are known to be efficiently calculated in numerical simulations using the Boundary Element Method (BEM).…”

Section: Introductionmentioning

confidence: 99%

“…The large deformations usually require the regeneration of the meshes for the FEM and the BEM numerical calculations, which makes the numerical calculation procedures very complicated and timeconsuming. Moreover, in the common FEM/BEM formulations infinitesimal strains and displacements are assumed; hence, the nonlinear effects due to large deformation effects cannot be included [3,4].…”

Section: Introductionmentioning

confidence: 99%

A multibody-based dynamic simulation method for electrostatic actuators

et al. 2007

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A numerical simulation method is developed to analyze the dynamic responses of electrostatic actuators, which are electromechanically-coupled systems. The developed method can be used to determine the dynamic responses of cantilever-type switches, which are an example of typical MEMS (Micro-Electro-Mechanical System) devices driven by an electrostatic force. We propose the approach that adopts a point charge to deal with electric field effects between electrodes. This approach may be considered as a lumped parameter model for the electrostatic interactions. An advantage of this model may be the easy incorporation of the electrostatic effects between electrodes into a multibody dynamics analysis algorithm. The resulting equations contain the variables for position, velocity, and electric charge to describe the motion of the masses and the charges on the electrodes in a system. By solving these equations simultaneously, the dynamic response of an electrostatically-driven system can be correctly simulated. In order to realize this approach, we implement the procedures into RecurDyn, the multibody dynamics software developed by the authors. The developed numerical simulation tool was evaluated by applying it to cantilever-type electrostatic switches in many different driving conditions. The results suggest that the developed tool may be useful for predicting behaviors of electrostatic actuators in testing as well as in design.

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“…Most of the literatures focus on the torsional motion of the micromirror, especially on the pull-in phenomenon (Degani et al 1998;Degani and Nemirovsky 2002;Zhang et al 2001). Some researchers also have investigated the dynamic characteristics of the micromirror Strozewski et al 1993;Fischer et al 1998;Sattler et al 2002;Evoy et al 1999;Kurth et al 1998), but few of them considered the coupled model of vertical translational and torsional motion simultaneously.…”

Section: Introductionmentioning

confidence: 99%

“…Moreover, because the micromirror reflective plane is a large thin plate, distributed electrostatic force on it can also bring on small deformation of the plate, which can affect the bending stiffness of the system and the dynamic characteristic of the micromirror. In this paper, the intrinsic stress of the micromirror is neglected as the assumption in above literatures (Jung et al 2001;Xiao et al 2001;Nemirovsky and Degani 2001;Degani et al 1998;Degani and Nemirovsky 2002;Zhang et al 2001;Wetsel and Strozewski 1993;Strozewski et al 1993;Fischer et al 1998;Sattler et al 2002;Evoy et al 1999;Kurth et al 1998).…”

Section: Introductionmentioning

confidence: 99%

A study on the coupled dynamic characteristics for a torsional micromirror

Zhao

Chen

2005

Microsyst Technol

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A nonlinear dynamic model of an electrostatic torsional micromirror considering the coupled effect of the torsion and vertical bending motion of its torsional beam simultaneously is presented. The effect of the vertical deformation of the mirror plate and the distributed mass of the torsion beam are also considered in this model. The validity of the model is verified by a finite element simulation with ANSYS. Undamped and damped responses of the torsional and vertical vibration of the micromirror are analyzed by the model given here. The results of the simulation indicate that this model can simulate the dynamic behaviors of the micromirror fast and accurately.

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Electrostatically deflectable polysilicon micromirrors — dynamic behaviour and comparison with the results from FEM modelling with ANSYS

Cited by 48 publications

References 9 publications

Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators

Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators

A multibody-based dynamic simulation method for electrostatic actuators

A study on the coupled dynamic characteristics for a torsional micromirror

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