Electrostatically actuated micro-fluidic optical cross-connect switch

Ollier, E.; Divoux, C.; Margail, J.; Enot, T.; Ortiz, Lizmarie Comenencia; Gobil, Y.; Berruyer, P.; Glière, Alain; Bontemps, André; Laporte, Marie-Ève; Bruel, M.

doi:10.1109/omems.2003.1233460

Cited by 3 publications

(4 citation statements)

References 2 publications

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“… ( Left ) Diffraction loss ( λ = 1550 nm) between two butt-coupled fixed waveguides of different technologies (SiO 2 /PSG/SiO 2 [ 65 ], InP/InGaAsP [ 36 ], SiO 2 /Si/Air [ 27 ]), as a function of the separation distance s . ( Right ) Reflection (Fresnel) loss at an interface between a material of refractive index n and air.…”

Section: Devices Based On Coupling Between Fixed Waveguidesmentioning

confidence: 99%

“…The first devices were based on thermally driven droplets (thermocapillarity effect [ 63 ] or vaporization [ 64 ]) using integrated heaters close to the slit, but one of their main drawback was that the heat would significantly change the fluid refractive index requiring special packaging scheme for mitigating this issue. The later device shown here [ 65 ], used an electrostatically driven membrane to push the fluid in and out of the slit, avoiding the problem of the thermal actuation.…”

Section: Devices Based On Coupling Between Fixed Waveguidesmentioning

confidence: 99%

“… 1 × 2 optical switch based on spoiling the total internal reflection with a fluid. (Insets) Cut-out view showing the electrostatic membrane actuator in the Through and Cross states (adapted from [ 65 ]). …”

Section: Devices Based On Coupling Between Fixed Waveguidesmentioning

confidence: 99%

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Devices Based on Co-Integrated MEMS Actuators and Optical Waveguide: A Review

Chollet

2016

Micromachines

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The convergence of Micro Electro Mechanical Systems (MEMS) and optics was, at the end of the last century, a fertile ground for a new breed of technological and scientific achievements. The weightlessness of light has been identified very early as a key advantage for micro-actuator application, giving rise to optical free-space MEMS devices. In parallel to these developments, the past 20 years saw the emergence of a less pursued approach relying on guided optical wave, where, pushed by the similarities in fabrication process, researchers explored the possibilities offered by merging integrated optics and MEMS technology. The interest of using guided waves is well known (absence of diffraction, tight light confinement, small size, compatibility with fiber optics) but it was less clear how they could be harnessed with MEMS technology. Actually, it is possible to use MEMS actuators for modifying waveguide properties (length, direction, index of refraction) or for coupling light between waveguide, enabling many new devices for optical telecommunication, astronomy or sensing. With the recent expansion to nanophotonics and optomechanics, it seems that this field still holds a lot of promises.

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Section: Devices Based On Coupling Between Fixed Waveguidesmentioning

confidence: 99%

Section: Devices Based On Coupling Between Fixed Waveguidesmentioning

confidence: 99%

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Devices Based on Co-Integrated MEMS Actuators and Optical Waveguide: A Review

Chollet

2016

Micromachines

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“…SU-8 mirrors on silicon actuators have been reported [6] but the long term adhesion of the two parts needs to be proven. A way to overcome the free space propagation of light is the use of waveguides [7,8]. The light beam is confined in a medium with high refractive index and only propagates in free space for a very short path length around the mirror to keep diffraction losses small.…”

Section: Introductionmentioning

confidence: 99%

4x4 and 8x8 optical cross connect for optical fiber networks

et al. 2004

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We report on a 4x4 optical matrix switch for telecom application. It consists of a 4x4 array of vertical mirrors that have the same pitch as the fibers of commercially available fiber ribbons (250 µm). This compact design enables a parallel assembly to optical components, which simplifies the time consuming and costly process for switches with larger pitch. Additionally, a small pitch leads to a short optical coupling length, which facilitates the integration of a suitable collimation system. However there are physical limitations for optical MEMS in conjunction with assembled micro-optics. The optical beam exiting a collimator diverges, the divergence angle is indirectly proportional to the beam waist and the coupling length increases quadratically. Our calculations show that for a pitch of 250 µm a mirror height of 100 µm is optimal. The mirrors are monolithically etched onto a platform etched during a previous step. No assembly of the mirrors to the actuators is needed. Alignment structures for the optical components are etched during the same step as the mirrors, which lead to self aligned structures. The platform is supported by 150 µm long torsion beams with sub-micron diameter. The electrostatic actuation voltage is given by a separate chip. The mirror moves out of the optical path when the platform is actuated and goes to the switching state if no voltage is applied. The first prototypes have been actuated at 200 V, which agrees with a CoventorWare simulation used for designing the device. Light was successfully switched with a 4x4 OXC. An 8x8 OXC is shown and electrostatically characterized.

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