Electrostatic Vibrational MEMS Energy Harvester with Thin Film Electrets

Toshiyoshi, Hiroshi; Honma, Hiroaki; Mitsuya, Hiroyuki; Hashiguchi, Gen

doi:10.1380/vss.63.223

Cited by 5 publications

(1 citation statement)

References 5 publications

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“…Potassium-ion electrets [6][7][8][9][10][11] can be fabricated by adding potassium atoms to amorphous silica (a-SiO 2 ) and then subsequently removing these atoms. A negative charge semi-permanently accumulates in the silica and forms an electric field.…”

Section: Introductionmentioning

confidence: 99%

Effect of carbon atoms on the reliability of potassium-ion electrets used in vibration-powered generators

Ohata¹,

Araidai²,

Shibata³

et al. 2022

Jpn. J. Appl. Phys.

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Potassium-ion electrets, which are key elements in vibration-powered microelectromechanical generators, can store negative charge almost permanently. However, our experiments show that the charge storing capability of potassium ion electrets is severely degraded when a SiC plate instead of the usual SiO2 plate is used in the fabrication process, indicating the negative influence of carbon incorporation. We theoretically studied the atomic and electronic structures of amorphous silica (a-SiO2) with and without potassium and carbon atoms using first-principles molecular-dynamics calculations. Our calculations show that negative charge accumulates in fivefold-coordinated Si atoms without carbon contamination. However, carbon contamination of the potassium-ion electret causes oxygen deficiencies in SiO2, hindering the formation of fivefold-coordinated Si atoms. As a result, carbon contamination causes degradation of the negative charge storing capability of potassium ion electrets.

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Section: Introductionmentioning

confidence: 99%

Effect of carbon atoms on the reliability of potassium-ion electrets used in vibration-powered generators

Ohata¹,

Araidai²,

Shibata³

et al. 2022

Jpn. J. Appl. Phys.

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Effect of hydrogen atoms on potassium-ion electrets used in vibration-powered generators

Ohata

Araidai²,

Ishiguro³

et al. 2023

Materials Science in Semiconductor Processing

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Negative-charge-storing mechanism of potassium-ion SiO2-based electrets for vibration-powered generators

Nakanishi

Miyajima

Chokawa

et al. 2020

Applied Physics Letters

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A potassium-ion electret, which is a key element of vibration-powered microelectromechanical generators, can store negative charge almost permanently. However, the mechanism by which this negative charge is stored is still unclear. We theoretically study the atomic and electronic structures of amorphous silica (a-SiO2) with and without potassium atoms using first-principles molecular-dynamics calculations. Our calculations show that a fivefold-coordinated Si atom with five Si–O bonds (an SiO5 structure) is the characteristic local structure of a-SiO2 with potassium atoms, which becomes negatively charged and remains so even after removal of the potassium atoms. These results indicate that this SiO5 structure is the physical origin of the robust negative charge observed in potassium-ion electrets. We also find that the SiO5 structure has a Raman peak at 1000 cm−1.

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Electrostatic Vibrational MEMS Energy Harvester with Thin Film Electrets

Cited by 5 publications

References 5 publications

Effect of carbon atoms on the reliability of potassium-ion electrets used in vibration-powered generators

Effect of carbon atoms on the reliability of potassium-ion electrets used in vibration-powered generators

Effect of hydrogen atoms on potassium-ion electrets used in vibration-powered generators

Negative-charge-storing mechanism of potassium-ion SiO2-based electrets for vibration-powered generators

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