“…Generally speaking, these methods can be summarized into two steps, of which one is to calculate the required electrostatic force based on mechanical analysis and the second one is to calculate the controlling voltages according to the parallel capacitor principle [19,20]. Considering the limitations of using the parallel capacitor principle to compute the controlling voltages, some researchers analyzed the electrical field distribution in the space between the membrane and the electrodes using the electrical field theory and finite element method [21][22][23], but they did not take the coupled problem into consideration. Moreover, the mechanical analysis assumed that the initial geometric configuration of the membrane was flat, which also brought many problems, such as the "W-profile" shape error, poor stress uniformity and high voltage demand if the membrane is required to stretch to small F/D surface [24][25].…”