Electrostatic micromechanic actuators

Breng, U.; Geßner, Thomas; Kaufmann, Christian; Kiehnscherf, R; Markert, Joachim

doi:10.1088/0960-1317/2/4/007

Cited by 14 publications

(5 citation statements)

References 1 publication

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“…In addition to LCDs and DMDs, other competing technologies for laser projection systems exist. A not comprehensive list includes LCoS (Liquid Crystal on Silicon), rotating polygon wheels, galvanic driven mirrors, and other Micro Scanning Mirrors [4] that use a different driving principle than the one by Fraunhofer IPMS. However, all of them are not suited for mobile devices because of lack of possibility for miniaturization.…”

Section: Basic Principles Of Image Display and System Architecturementioning

confidence: 99%

“…For all other cases (even numbers for f x and/or f y ) the distance between two knots in the center is equal to (3) with an optimum phase shift φ = 0. For high frequencies the maximum distance between two knots in the direction perpendicular two the oscillation axis can be approximated to (4) In order to achieve the required geometrical resolution of the projected image this difference must be smaller than the size of one pixel, The discrete pixels require the correction of the knots of the Lissajous figure with half the resolution of the axis with lower pixel count:…”

Section: Mathematical Analysismentioning

confidence: 99%

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Ultra compact laser projection systems based on two-dimensional resonant micro scanning mirrors

Scholles

Bräuer

Frommhagen

et al. 2007

MOEMS and Miniaturized Systems VI

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Recently, there has been substantial progress in the development of ultra-compact image projection systems with dimensions clearly below the size of products based on DMDTM technology. This has been enabled by the availability of electrically modulated laser sources for all three elementary colors and a two-dimensional resonant micro scanning mirror as MOEMS device for light deflection. The laser beam formed by collimator optics is directed onto the micro scanning mirror. Then, the reflected beam describes a highly complicated Lissajous figure on the projection screen with flare angles of up to 20 degrees. By driving the mirror and electrically modulating the intensity of the laser beam in a synchronous manner, projection of images can be achieved. In this contribution we will present the theoretical background of the projection system as well as the latest achievements in system design. Both monochrome and full color systems are currently available. The latter use a separate laser bank as RGB light source, which is coupled with the projection head comprising the micro-optics and the micro scanning mirror. For monochrome red systems, the laser diode can be integrated into the projection head as well, whose volume could be reduced to 15mm x 7 mm x 5mm. All systems have VGA (640 x 480 pixels) resolution and operate with 8 bit color depth per pixel and 50 frames per second. This degree of miniaturization makes laser projection systems attractive for integration into mobile devices and overcomes limitations of display size in such appliances

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Section: Basic Principles Of Image Display and System Architecturementioning

confidence: 99%

Section: Mathematical Analysismentioning

confidence: 99%

Ultra compact laser projection systems based on two-dimensional resonant micro scanning mirrors

Scholles

Bräuer

Frommhagen

et al. 2007

MOEMS and Miniaturized Systems VI

View full text Add to dashboard Cite

show abstract

“…A not comprehensive list includes LCoS (Liquid Crystal on Silicon), rotating polygon wheels, galvanic driven mirrors, and other Micro Scanning Mirrors [4] that use a different driving principle than the one by Fraunhofer IPMS. However, all of them are not suited for mobile devices because of lack of possibility for miniaturization.…”

Section: Lasermentioning

confidence: 99%

“…For high frequencies the maximum distance between two knots in the direction perpendicular two the oscillation axis can be approximated to (4) Once again, this is only true for optimum phase difference between the two axes. In order to achieve the required geometrical resolution of the projected image this difference must be smaller than the size of one pixel, especially in the center of the image since the velocity of the laser beam has its maximum in this region.…”

Section: Mathematical Analysismentioning

confidence: 99%

Design of miniaturized optoelectronic systems using resonant microscanning mirrors for projection of full-color images

et al. 2006

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Projection systems comprising micromechanical scanning mirrors are a promising approach for information display of any kind. If combined with advanced laser diodes as light sources, ultra-compact projection heads can be realized, as it will be shown in this contribution. Besides the laser, key component of the system is a special MEMS device, a two-dimensional resonant micro scanning mirror. The laser beam formed by collimator optics is directed onto the micro scanning mirror. Then, the reflected beam describes a highly complicated Lissajous figure on the projection screen with flare angles of up to 20 degrees. By driving the mirror and electrically modulating the intensity of the laser beam in a synchronous manner, projection of images can be achieved. Advanced techniques that guarantee improved image quality and allow compensation of artifacts because of relative movement between projection head, screen, and human observer will be described. Based on these principles, several optoelectronic systems have been designed. A monochrome projection head that incorporates the laser diode, optics and the micro minor could be reduced to a volume of 15mm × 7 mm × 5mm. A slightly larger head is attached to a laser unit with red, green, and blue lasers via glass optical fiber for projection of full color images and video streams. All systems have VGA (640 × 480 pixels) resolution. They operate with 8 bit color depth per pixel and 50 frames per second. These key features in combination with the miniaturized size allow their use for a broad range of applications

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“…MEMS are more convenient than scanners such as galvanometric, oscillatory or polygon mirrors not only because of their large mechanical deflection angle but also for their high level of integration. Various movable optical micromachined mirrors for beam scanning applications have been developed in the last few years [6][7][8]. In these systems, a high driving voltage is generally required for large deflection angles and large mirror surfaces.…”

Section: Introductionmentioning

confidence: 99%

Association of acousto-optic and microscanning mirrors for diffractive memory high-speed reading

Kiefer¹,

Takakura²,

Fontaine³

et al. 2003

SPIE Proceedings

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We present an investigation that has been carried out on the design of a high speed scanning system for a data storage application. Polypeptide material is used to store data by the angular multiplexing process. This material presents many advantages compared with others. To address the optical memory, our set-up is composed of micro-scanning mirrors (MEMS) and an acousto-optic deflector (AOD). This association leads to an addressing set-up with a very good performance in terms of the access time and the angular bandwidth. Experimental tests made with micro-scanning mirrors (MEMS) of 3 X 3mm 2 are described. Problems of synchronisation between the different elements and the influences of MEMS deformation are also discussed.

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Electrostatic micromechanic actuators

Cited by 14 publications

References 1 publication

Ultra compact laser projection systems based on two-dimensional resonant micro scanning mirrors

Ultra compact laser projection systems based on two-dimensional resonant micro scanning mirrors

Design of miniaturized optoelectronic systems using resonant microscanning mirrors for projection of full-color images

Association of acousto-optic and microscanning mirrors for diffractive memory high-speed reading

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