Electrostatic microactuator and design considerations for HDD applications

Fan, Long-Sheng; Hirano, T.; Hong, John; Webb, Patrick; Juan, W. H.; Lee, W.Y.; Chan, S.; Semba, T.; Imaino, W.; Pan, Tingrui; Pattanaik, S.; Lee, F.C.; McFadyen, I. R.; Arya, S.; Wood, Roger

doi:10.1109/20.753823

Cited by 49 publications

(19 citation statements)

References 8 publications

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“…Such a displacement may be sufficient to affect the read/write process. A rotary electrostatic microactuator proposed by IBM [8][9][10] could greatly reduce such shock sensitivity and assure greater reliability of the read/write process. The microactuator consisted of a rotating plate supported on a substrate by four linear springs.…”

Section: Introductionmentioning

confidence: 99%

A suspension integrated with a piezoelectric microactuator for dual stage actuation

Zhong

Sun

2004

Int J Adv Manuf Technol

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This paper presents a shear-mode piezoelectric microactuator that can be easily integrated with a suspension for dual stage actuation used in hard disk drives. The finite element method was employed to investigate the static and dynamic performance of the assembly using a simple cantilever suspension integrated with the microactuator. Experiments were also conducted to verify the numerical analysis results. A modern suspension integrated with the microactuator was then simulated based on the optimised structure of the actuator/suspension assembly, and the results showed that 1.17-µm tip stroke could be obtained while the driving voltage was only 20 V.

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Section: Introductionmentioning

confidence: 99%

A suspension integrated with a piezoelectric microactuator for dual stage actuation

Zhong

Sun

2004

Int J Adv Manuf Technol

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“…Electrostatic microactuators have been applied in many applications such as hard disc drives and aeronautical fields (Fan et al 1999;Rashedin et al 2006). These actuators provide fast response, small energy loss and reversible motion, while they often suffer from a limited displacement range, short lifetime and high voltage requirements for their operation (Donald et al 2006;Nisar et al 2008).…”

mentioning

confidence: 99%

Thermomechanical behavior of bulk NiTi shape-memory-alloy microactuators based on bimorph actuation

et al. 2015

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“…Several MA designs have been proposed for dualstage actuation in hard disk drives (Fan et al, 1999), (Horsley et al, 1999). The MA design proposed in this paper utilizes parallel-plates actuation scheme for high actuation force output and comb-drive sensing scheme for linear position sensing performance.…”

Section: Introductionmentioning

confidence: 99%

Suspension Vibration Compensation Using a MEMS Microactuator in Hard Disk Drives

Chen

Oldham

et al. 2002

IFAC Proceedings Volumes

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This paper discusses the design and fabrication of a prototype MEMS microactuator and vibration sensors, and controller design for suspension vibration compensation in disk drives. The microactuator utilizes parallel-plates actuation and comb-finger position sensing. An electrical isolation MEMS fabrication technique is utilized to increase the actuation force. An LQG method is proposed for vibration sensor location and orientation optimization. Strain sensors are fabricated by depositing polysilicon on a metal wafter. A vibration control scheme using adaptive feedforward control is formulated to cancel suspension vibration using the microactuator.

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Electrostatic microactuator and design considerations for HDD applications

Cited by 49 publications

References 8 publications

A suspension integrated with a piezoelectric microactuator for dual stage actuation

A suspension integrated with a piezoelectric microactuator for dual stage actuation

Thermomechanical behavior of bulk NiTi shape-memory-alloy microactuators based on bimorph actuation

Suspension Vibration Compensation Using a MEMS Microactuator in Hard Disk Drives

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