Electrostatic forces and their effects on capacitive mechanical sensors

Puers, Robert; Lapadatu, Daniel

doi:10.1016/s0924-4247(96)01310-6

Cited by 87 publications

(28 citation statements)

References 6 publications

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“…Assuming the micro-mechanical sensor is operated in Q-drive mode, [30] and has a constant offset displacement, the average vertical deflection of the bi-material plate may be described by,…”

Section: Theorymentioning

confidence: 99%

A MEMS viscometer for unadulterated human blood

2010

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The design and theoretical modelling of an oscillating micro-mechanicalviscometer designed for the measurement of whole unadulterated human blood, is described. The proposed device utilises the dependence of the squeeze-film damping ratio on properties of the surrounding fluid to measure fluid viscosity using an oscillating plate structure. The optimum geometrical configuration for the device structure has been investigated and a methodology for defining the optimum configuration of the micro-mechanical sensor identified. This is then applied to calculate the predicted noise equivalent viscosity change

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Section: Theorymentioning

confidence: 99%

A MEMS viscometer for unadulterated human blood

2010

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“…A model for electrostatic actuation was presented by [20]. In the present case, where the relative motion of the plates is purely perpendicular, the electrostastic force between the capacitor plates is given by:…”

Section: Electrostatic Actuationmentioning

confidence: 99%

Micro rate sensors in CMOS technology

Seter

Kaldor

1998

Elektrotech. Inftech.

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The fundamental study and the technological research undertaken towards the development of a micromechanical rate sensor are presented. Two interconnected aspects: the scientific development activities and the investigation into a new technology are referred to, and some points of interest are highlighted. Among them: machining accuracy problems, the nonlinearity of electrostatic actuation and the optical sensing method of displacements. These points from the type and concepts of the proposed devices. Finally, some early results of interest from simulations of one prototype, are presented and discussed. The work is done in cooperation with staff and graduate students from the faculties of: E. E. & M. E. in the Technion (Israel Institute of Technology).

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“…When subjected to an incident ultrasonic wave, the diaphragm deforms and the capacitance between the diaphragm and the fixed backplate changes dynamically following the dynamic characteristics of the incident wave. A suitable microelectronic circuit is used to convert the capacitance change to a useful voltage signal (Puers and Lapadatu 1996).…”

Section: Introductionmentioning

confidence: 99%

Fabrication and measurements of dynamic response of an SOI based non-planar CMUT array

Zure

Chowdhury

2012

Microsyst Technol

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An SOI based hyperbolic paraboloid geometry capacitive micromachined ultrasonic transducer (CMUT) array has been fabricated to realize a frequency independent constant beamwidth broadband beamforming capability. Detailed fabrication and packaging techniques are presented along with measurement results on individual CMUT cells for transient and steady-state response using a Polytec laser Doppler vibrometer. The measurement results are compared with analytical and 3-D electromechanical finite element analysis using IntelliSuite TM . The measured results are in excellent agreement with analytical and FEA results. Measurement results also show that the CMUTs exhibit a flat bandwidth within the specified frequency range. SEM inspection also shows very close agreement between mask features and fabricated geometry that ensures reproducibility of the device with a high degree of fidelity. The CMUT array has been designed for automotive blindspot detection application and works in the 113-167 kHz range.

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Electrostatic forces and their effects on capacitive mechanical sensors

Cited by 87 publications

References 6 publications

A MEMS viscometer for unadulterated human blood

A MEMS viscometer for unadulterated human blood

Micro rate sensors in CMOS technology

Fabrication and measurements of dynamic response of an SOI based non-planar CMUT array

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