Electrostatic force-feedback force sensor incorporated in an ultrahigh vacuum force microscope

Yakimov, Vladimir; Erlandsson, R.

doi:10.1063/1.1150147

Cited by 7 publications

(4 citation statements)

References 21 publications

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“…Such adhesive forces have been predicted and observed for different types of materials of tip and sample in metallic systems. [41][42][43][44] Many molecular dynamic simulations of deformable metal tips indenting metal surfaces have shed light on the physical phenomena that are involved in adhesive interactions, their results reproduce nicely our experiments preformed on the metallic NiAl͑110͒.…”

Section: Resultssupporting

confidence: 74%

Frequency-modulated atomic force spectroscopy on NiAl(110) partially covered with a thin alumina film

et al. 2006

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Force spectroscopy has been performed using a low-temperature scanning tunneling microscope (STM) and atomic force microscope (AFM) with small amplitude frequency modulation (FM). Frequency shift versus distance curves acquired on NiAl(110) are compared to measurements performed on a thin alumina film. Interaction force and energy are determined from the frequency shift. Due to the high stability of small amplitude frequency modulation in combination with a stiff force sensor, it is possible to observe clear differences in the interaction potential between the metal and oxide surface. The setup also allows us to gain specific information in the repulsive regime of the contact formation, where elastic and plastic stages have been identified

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Section: Resultssupporting

confidence: 74%

Frequency-modulated atomic force spectroscopy on NiAl(110) partially covered with a thin alumina film

et al. 2006

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“…In other cases a magnetostrictive film has been deposited on top of the cantilever, which exerts a bending moment on it as the film changes its length under a similarly-applied magnetic field [17]. A piezoelectric film on the cantilever will also change its length under an applied voltage [18], and the effective stiffness of conductive cantilevers can be controlled by varying the voltage on electrodes positioned near them [19][20][21].…”

Section: Introductionmentioning

confidence: 99%

A preliminary investigation of the potential mechanical sensitivity of vertical comb drives

Gallagher¹,

Moussa²

2014

J. Micromech. Microeng.

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This article describes a preliminary step taken in investigating the potential of vertical comb drives to be used as force-compensation mechanisms in interfacial force microscopes, by exploring the lower limit of the stiffness of the springs the comb drives can be fabricated with. The stiffness of their springs will affect the sensitivity of the microscope. Six vertical comb drives were fabricated for this study; the dimensions of their spring beams were chosen with the intention of giving them stiffnesses of three different orders of magnitude. During fabrication it was found that etching the tops of some of the teeth down to create the vertical offset between the combs can be done using only photoresist to mask the rest of the teeth. The stiffnesses of the fabricated springs were estimated by applying loads to them and measuring their resulting deflections. Weights were applied to the two comb drives with the stiffest springs. Voltages were also applied to them so as to determine the force-voltage relationship for their comb design. Since the other four comb drives had the same comb design, the stiffnesses of their springs could be estimated from the displacements of their movable combs when voltages were applied to them.

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“…Deflection of the cantilever is detected by a sensor, and its output is fed back to a force actuator. The actuator generates electrostatic 6,[15][16][17][18][19][20] or magnetic [21][22][23][24][25] force to compensate the deflection of the cantilever. The input signal to the actuator is detected as the measured force.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of polymer cantilevers for force-controlled atomic force microscope

Kato

Park

Matsumoto

et al. 2003

Lithographic and Micromachining Techniques for Optical Component Fabrication II

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I SUMMARY 3The focus of the research effort in the Precision Engineering Center is to improve the capability of precision manufacturing process. This focus requires research into new sensors and measurement techniques for surface characterization, in-depth studies of fabrication techniques, and hardware and software solutions for enhanced machine control. The projects have been written as separate Sections but the interaction between projects is the strength of this organization. The multidisciplinary viewpoint provided by this unique group of faculty and students with their different backgrounds and experiences is the essence of the Precision Engineering Center. The product of the Center is new technology as well as a new cadre of researchers. The students involved in the Center, described in the back of this report, are of the highest quality. The project summaries are arranged under three broad categories: 3 * Measurement and Motion-Fabrication Techniques I •Machine Control. 3 MEASUREMENT AND MOTION The emphasis in these projects has been to develop techniques that can be used to characterize fabricated surfaces at nanometer resolution as well as to study drive systems that have the potential for nanometer positioning resolution. Atomic Force Microscopy-The AFM has become an increasingly popular tool for material characterization. It allows the imaging of a surface with a resolution as high as the atomic limit. However, the interpretation of the images is influenced by the parameters of the microscope and the tip. For example, the choice of imaging mode-constant force height or differential force mapping-may have a significant impact on the resulting image as will the relative radius of the tip and the surface features. I I.

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Electrostatic force-feedback force sensor incorporated in an ultrahigh vacuum force microscope

Cited by 7 publications

References 21 publications

Frequency-modulated atomic force spectroscopy on NiAl(110) partially covered with a thin alumina film

Frequency-modulated atomic force spectroscopy on NiAl(110) partially covered with a thin alumina film

A preliminary investigation of the potential mechanical sensitivity of vertical comb drives

Fabrication of polymer cantilevers for force-controlled atomic force microscope

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