Electrophoretic Deposition of Pb(Zr, Ti)O3 Powder on Si Wafer: Morphological Change Across Film Thickness

Kang, Ni; Li, Jing‐Feng

doi:10.2109/jcersj.114.128

Cited by 4 publications

(2 citation statements)

References 12 publications

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“…After sintering selected layers at 1150°C, a homogeneous, dense PZT film with a thickness of 8 μm was reported. Kang et al . reported the processing of up to 17‐μm‐thick PZT films on silicon from ethanol‐based suspensions.…”

Section: Introductionmentioning

confidence: 99%

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Lead–Zirconate–Titanate Thick Films by Electrophoretic Deposition for High‐Frequency Ultrasound Transducers

et al. 2011

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Lead–zirconate–titanate (PZT) thick films for high‐frequency ultrasound applications were fabricated using an electrophoretic deposition (EPD) process. The PZT powder was synthesized from constituent oxides at close‐to‐room temperature by mechanochemical activation followed by calcination at 700°C. Homogeneous PZT thick films with a thickness of ~30 μm and a density of ~80% were produced from ethanol‐based colloidal suspensions containing PZT and PbO particles that were deposited using a constant‐current mode on a platinized alumina substrate and were sintered in the presence of a liquid phase at temperatures compatible with thick‐film technology. The dielectric, mechanical, and piezoelectric parameters of the PZT thick films with a porosity of ~20% were measured and a thickness‐coupling factor of 48% was obtained. Considering that a PZT thick film is a composite structure consisting of PZT and pores, there are several methods that can be applied to calculate the effective parameters where the composite is considered as a piezoelectric homogeneous material. For this study, a matrix method based on a generalization of 2‐2 connectivity was used to deduce the parameters of a completely dense configuration. Our results confirmed that the EPD process is suitable for the fabrication of efficient, high‐frequency transducers operating at frequencies above 40 MHz.

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Section: Introductionmentioning

confidence: 99%

“…A more common approach is to prepare a suspension from PZT powder. Ma et al 20 and Kang et al 41 studied the deposition conditions for processing PZT thick films. They prepared 160 and 300 lm as-deposited PZT layers, respectively, from ethanolbased suspensions.…”

Section: Introductionmentioning

confidence: 99%