Electronic Temperature Compensation of Lateral Bulk Acoustic Resonator Reference Oscillators Using Enhanced Series Tuning Technique

Performance Comparison of Oscillator Circuit Topology for MEMS SAW Resonator

“…The sustaining amplifier circuits define the oscillator topology where there are several oscillator topologies namely; pierce oscillator, transimpedance amplifier, differential amplifier, colpitts oscillator, Hartley oscillator and cross coupled oscillator. However, MEMS based oscillator used only differential amplifier circuit [6], pierce circuit [7]- [11] and transimpedance amplifier circuit [12]- [16]. The topology chosen is normally based on the design specifications such as low power and low noise oscillator.…”

“…Pierce circuit topology and TIA circuit topologies in [7]- [10], [14]- [16] was simulated using MIMOS 0.35µm technology. Their DC simulation results are summarized in Table 1.…”

RF MEMS reference oscillator platform with ±0.5ppm frequency stability for wireless handsets

“…Fig.2 shows the top view and cross section of the resonator. Temperature stability [4,5] is pivotal for wireless communications. SiO 's positive temperature coefficient of frequency TCF compensates for silicon's negative TCF.…”

“…The bias circuit is implemented in standard cascode topology to reduce the curvature and inaccuracy due to process corners [4]. The temperature slope of the ∆VBE is about 174 V/ºC, while that of VBE is -2mV/ºC; and hence, =11.5 and ADC Vref=1.2.…”

“…MEMS fabrication tolerances lead to frequency offset error up to 8000 ppm [3], which can't be mitigated by SiO material temperature compensation, urging for electronic compensation [4,5]. The electronic compensation system essentially consists of temperature sensor, compensation circuitry and frequency tuning mechanism as shown in Fig.1.…”