Electronic structure and bonding properties of Si-doped hydrogenated amorphous carbon films

Abstract

The effect of nitrogen incorporation on the bonding structure of hydrogenated carbon nitride films Electron cyclotron resonance deposition, structure, and properties of oxygen incorporated hydrogenated diamondlike amorphous carbon films

Enhancement of sp3-bonding in high-bias-voltage grown diamond-like carbon thin films studied by x-ray absorption and photoemission spectroscopy

“…When V b is increased to 600 V, these bands shift to higher energies of 285.3 and 293.0 eV, respectively, and may be due to the formation of more DLC films. The π * feature is typical of the C=C bond (sp 2 ) whereas the σ * feature is typical of the tetrahedral C-C bond (sp 3 ) [7,10,11]. A very weak C-H feature is also observed in all films at ∼287 eV [7,10,11], as shown in the inset of figure 1, which suggests that the content of C-H bonds is relatively low compared to those of sp 2 and sp 3 bonds.…”

“…The π * feature is typical of the C=C bond (sp 2 ) whereas the σ * feature is typical of the tetrahedral C-C bond (sp 3 ) [7,10,11]. A very weak C-H feature is also observed in all films at ∼287 eV [7,10,11], as shown in the inset of figure 1, which suggests that the content of C-H bonds is relatively low compared to those of sp 2 and sp 3 bonds. The content of sp 2 -bonded carbon atoms of each sample was estimated from the integrated area between a Gaussian fit of the spectrum and the baseline in the 282.2-286.2 eV range.…”

“…Surface plasmons are confined to the surfaces and they interact strongly with the incident light. Peak III at 12.2 ± 0.5 eV is presumably associated with C-H bonds [7] or perhaps with a mixture of s and p bands of carbon atoms [14]. Here, p π and p σ represent sp 2 -and sp 3 -bonded carbon, respectively.…”

“…V b has the most significant effect on the mechanical, optical and electrical properties [1,4]; a change in V b causes structural variations of the DLC films during deposition. Previous studies have focused on the various properties of DLC films deposited by different methods [5][6][7][8]. This work, 5 Author to whom any correspondence should be addressed.…”

Heteroatom-doped hydrogenated amorphous carbons, a-C:H:X

“…Si can incorporate into the network of a-C:H materials where it promotes the formation of sp 3 carbon clusters (e.g., Yoshikawa et al 2004;Ray et al 2004). Conversely, amorphous silicates can be doped with hydrocarbons to yield Si(CH 3 ) 1,2 structures (Grishko & Duley 2002a).…”