Electronic-Photonic Platform for Label-Free Biophotonic Sensing in Advanced Zero-Change CMOS-SOI Process

Microfluidic Packaging Integration with Electronic-Photonic Biosensors Using 3D Printed Transfer Molding

“…In an effort to address these dual challenges, silicon photonic biosensors-fabricated using techniques based on integrated circuit manufacturing-have shown increasing promise in monitoring label-free molecular interactions through the evanescent field interaction of light, tightly confined to a waveguide, with the surrounding optical environment. In particular, one such structure where light of a specific wavelength is trapped in a ring (called a micro-ring resonator or micro-ring resonator (MRR)-based photonic devices), has been able to detect a wide range of molecular concentrations of different target analytes ranging from femtomolar to micromolar by leveraging high transducer sensitivity and small transducer area [4][5][6][7][8][9][10][11][12][13]. However, one of the key challenges towards efficient and diverse multiplexed sensing of multiple biomarkers is the fabrication of fluidic delivery devices to interface with the extraordinary density and degree of integration of arrays of micrometer-scale MRRs, while allowing for both optical and electrical coupling to the integrated circuit, which is often on a millimeter-square scale.…”