We have investigated the formation of native defects in anatase TiO 2 using density functional theory ͑DFT͒ modified with on-site Coulomb terms ͑DFT+ U͒ applied to both Ti d and O p states. Oxygen vacancies and titanium interstitials are found to be deep donors that trap two and four electrons, with transition levels that explain the two features seen in deep level transient spectroscopy experiments. Titanium vacancies are deep acceptors accommodating four holes. Self-trapping of both electrons and holes is also predicted. In all cases both donor and acceptor trap states correspond to strongly localized small polarons, in agreement with experimental EPR data. Variation in defect formation energies with stoichiometry explains the poor hole-trapping of reduced TiO 2 . DOI: 10.1103/PhysRevB.80.233102 PACS number͑s͒: 71.38.Ht, 71.55.Ϫi, 82.50.Ϫm In semiconductors used in photocatalysis and photovoltaics, the primary process is the light-induced production of charge carriers.1 Photocatalysis proceeds by photoexcitation of electrons to unoccupied bands, producing free electronhole pairs. These charge carriers then typically undergo trapping, followed by diffusion to the surface where they can initiate reactions of adsorbed molecules. Electron-hole recombination is often a major competing process, and it is highly desirable to promote charge separation and inhibit subsequent charge-carrier-recombination in order to improve the quantum efficiency of photocatalytic processes.TiO 2 has been widely studied as a photocatalyst for the degradation of environmental pollutants, 1 and for water splitting. 2 Nanocrystalline anatase TiO 2 is often used, since it is more photocatalytically active than the ground-state polymorph, rutile, and the diffusion pathways of photogenerated charge carriers to the surface are shortened, resulting in increased quantum efficiencies.Following photoexcitation, trapping of charge carriers occurs on a nanosecond time scale.3 Defects are thought to play a critical role in the trapping process by acting as recombination centers. For example, n-type doping of anatase reduces the photocatalytic activity of experimental samples, 4 and reduced anatase is less efficient than stoichiometric TiO 2 in the trapping of photogenerated holes.5 Understanding the interaction of defects with charge carriers is essential for the optimization of TiO 2 samples for photocatalysis. Electronand hole traps have both been observed in EPR spectra. [5][6][7][8] These data have been interpreted as charge localization at single atoms to give small polarons: hole trapping has been associated with O − sites; O O • , and electron trapping with Ti 3+ species; Ti Ti Ј . Additional evidence for charge localization at Ti 3+ states in n-type TiO 2 comes from core-level XPS shifts, and characteristic gap-state features observable in UPS spectra, with samples annealed to produce oxygen vacancies giving identical EPR signals to those seen following uv irradiation. Deep traps 0.9 and 0.5 eV below the conduction band edge have also bee...