Electronic Circuits for Piezoelectric Resonant Sensors

Umapathy, M.; Uma, G.; Suresh, K.

doi:10.1007/978-81-322-1913-2_26

Cited by 1 publication

(1 citation statement)

References 18 publications

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“…One of the major bottlenecks was to ensure the reproducibility and high orientation of the thin films in the process of deposition. Another unfavourable factor was that two separate piezoelectric patches had to be used for excitation and detection of the resonance frequency [8]. By contrast, quartz resonators could be mass‐produced with low cost on the microscale, which were simultaneously used for actuation and sensing with a simple self‐oscillation circuit [9].…”

Section: Introductionmentioning

confidence: 99%

Modelling and characterisation of a micromachined resonant pressure sensor with piezoelectric excitation and sensing

Cheng

Zhao

et al. 2016

Micro & Nano Letters

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A resonant pressure sensor with piezoelectric excitation and sensing is presented, which is realised by combining a micromachined diaphragm and a quartz resonator. The sensor performance is improved by introducing double enhancement beams into the diaphragm. Finite element method is utilised to reveal the validity and optimise the structural dimensions. A self-excitation circuit is designed to drive the resonator into steady oscillation. The sensor chip is fabricated by bulk micromachining technologies and packaged in a metal shell in the inert gas environment for characterisation. The performance characteristics including the short-term drift, temperature characteristic and quality factor are investigated. The experimental results demonstrate that the sensor features a high sensitivity of 100.45 Hz/kPa and a short-term drift <14 ppm in the operating range of −10∼10 kPa at room temperature. Owing to the excellent performance in sensitivity and accuracy, the sensor can be applied for micropressure measurement.

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Section: Introductionmentioning

confidence: 99%