Electronic and Structural Effects of Nitrogen Doping on the Ionic Conductivity of γ-Li3PO4

Rabaâ, Hassan; Hoffmann, Roald

doi:10.1006/jssc.1999.8260

Cited by 7 publications

(2 citation statements)

References 24 publications

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“…This is consistent with prior work that has identified nitrogen substitution can improve the ionic conductivity over that of pure Li 3 PO 4 films. [1][2][3][4][5][6][7][8]10,13,42,45,49,50] Another trend in LiPON film chemistry with deposition temperature is the tendency for the higher deposition temperature to result in films with a more strongly reducing and less oxidizing chemistry. The non-LiPON atomic percentages for Li, N, O, and P given in Tables 3 and 4 (derived from the high resolution spectra) can be summed to determine the percentage of non-LiPON bonding in the films.…”

Section: Pressure Effects At 10w Substrate Bias Conditionmentioning

confidence: 99%

Ionic conductivity of bias sputtered lithium phosphorus oxy-nitride thin films

et al. 2016

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This manuscript reports a study of the ionic conductivity of radio frequency sputter deposited, lithium phosphorous oxy-nitride (LIPON), solid state electrolyte amorphous thin films. Films having compositions near Li 2.5 PO 3.5 N 0.5 were deposited under varying conditions of process gas, substrate bias, and deposition temperature. To understand the variations in ionic conductivity observed, the films were extensively characterized to examine structural and compositional differences, including examination by x-ray photoelectron spectroscopy (XPS), inductively coupled plasma optical emission spectroscopy, and spectroscopic ellipsometry. For the XPS study, depth profiling was used to allow a critical examination of the role of triply coordinated nitrogen in the ionic conductivity of LIPON. The highest ionic conductivity of 9.8 x 10-6 S/cm was obtained at an elevated deposition temperature and is correlated to a reduced density of defects, as indicated from the optical characterization.

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Section: Pressure Effects At 10w Substrate Bias Conditionmentioning

confidence: 99%

Ionic conductivity of bias sputtered lithium phosphorus oxy-nitride thin films

et al. 2016

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“…The most important application of lithium phosphate lies in the field of lithium batteries. For example, lithium phosphate film doped with nitrogen is the most widely used electrolyte membrane in solid-state thin film lithium batteries (Rabaâ & Hoffmann, 1999). It is also a stable lithium ion conducting solid electrolyte, because stable P O bonds facilitate the ionic diffusion of Li + in the interface between the cathode and electrolyte.…”

Section: Introductionmentioning

confidence: 99%