Electron power absorption in capacitively coupled neon-oxygen plasmas: a comparison of experimental and computational results
A. Derzsi,
P. Hartmann,
M. Vass
et al.
Abstract:Phase Resolved Optical Emission Spectroscopy (PROES) measurements combined with 1d3v Particle-in-Cell/Monte Carlo Collisions (PIC/MCC) simulations are used to study the electron power absorption and excitation/ionization dynamics in capacitively coupled plasmas (CCPs) in mixtures of neon and oxygen gases. The study is performed for a geometrically symmetric CCP reactor with a gap length of 2.5 cm at a driving frequency of 10 MHz and a peak-to-peak voltage of 350 V. The pressure of the gas mixture is varied bet… Show more
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