The sections in this article are
Introduction
Silicon
Defect Production
The Silicon Vacancy
Electronic Structure
Effects of Lattice Relaxation – General Considerations
Electrical Level Positions of the Vacancy
Vacancy Migration
Vacancy Interactions with other Defects
The Silicon Interstitial
Interstitial Migration
Trapped Interstitials
Theory of the Silicon Interstitial
Close Frenkel Pairs
Other Group
IV
Semiconductors
Germanium
Diamond
Si
C
II
–
VI
Semiconductors
Zn
Se
The Zinc Vacancy
Zinc Vacancy Diffusion and Interaction with other Defects
Interstitial Zinc and Close Frenkel Pairs
Defects on the Selenium Sublattice
Other
II
–
VI
Materials
The Metal Vacancy
The Chalcogen Vacancy
The other Intrinsic Defects
Theory
III
–
V
Semiconductors
Antisites
The Anion Antisite
V
III
The Cation Antisite
III
V
Group‐
III
Atom Vacancies
Metal Interstitials
Defects on the Group‐
V
Sublattice
Summary and Overview
Summary
Group
IV
Semiconductors
II
–
VI
Semiconductors
III
–
V
Semiconductors
Overview
Vacancies
Interstitials
Antisites
Migration Barriers
Acknowledgements