2017
DOI: 10.1063/1.4986361
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Electron microscopy with high accuracy and precision at atomic resolution: In-situ observation of a dielectric crystal under electric field

Abstract: Measuring atomic positions in-situ under an external electric field can provide important insights into the structure-property relationship of electronic materials. In this paper, we demonstrate picometer level accuracy and precision of atomic positions in single-crystalline SrTiO3 under an electric field through annular dark-field scanning transmission electron microscopy. By carrying out electrical biasing in-situ electron microscopy at the atomic scale, the lattice constant was measured with a precision of … Show more

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Cited by 14 publications
(4 citation statements)
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“…The obtained images were smoothened via radial Wiener filtering (HREM Research Inc.). The positions of the A-and B-site cations in the images were determined using the two-dimensional Gaussian fitting method 58 to calculate the displacements of the A-site cations relative to the centers of the unit cells formed of B-site cations.…”
Section: Methodsmentioning
confidence: 99%
“…The obtained images were smoothened via radial Wiener filtering (HREM Research Inc.). The positions of the A-and B-site cations in the images were determined using the two-dimensional Gaussian fitting method 58 to calculate the displacements of the A-site cations relative to the centers of the unit cells formed of B-site cations.…”
Section: Methodsmentioning
confidence: 99%
“…For instance, for the 200 nm-thick GIS-deposited Pt and C pathways in the empty MEMS-based chip (no lamella ) shown in Fig. S2 , parasitic currents in the range of 10 −5 A were measured between the inner and outer electrodes at an applied dc bias of 0.1 V. Similarly, the leakage current values reported for two-terminal thin-film metal-insulator-metal (MIM) TEM lamella devices range from 10 −5 to 10 −2 A at 0.1 V 7 10 , 14 , 16 18 (Figs. S3 and S4 ).…”
Section: Introductionmentioning
confidence: 83%
“…A‐site (Bi/Ba) and B‐site (Fe/Ti) ion column positions were determined using a 2D Gaussian fitting method. [ 62 ] Image distortions due to specimen drift and a scanning microscope system were corrected using a two‐step affine transformation method, [ 63,64 ] and the measured lattice parameter was observed to be up to ≈0.11% accurate. A‐site ion off‐centering was calculated as the deviation from the center of the B‐site ion sub‐lattice.…”
Section: Methodsmentioning
confidence: 99%