Electron Induced Ionization Of Molecules With Plasma-Technological Relevance

Abstract

This article describes recent experimental results for the dissociative electron impact ionization of the SiF 4 and B 2 H 6 molecules using the time-of-flight mass spectrometric technique. A detailed description of the experimental method is given. Complete sets of the absolute ionization cross sections for the formation of all ions from SiF 4 and from B 2 H 6 were determined with an overall uncertainty of +15% in the energy range from threshold to 200 eV. Additional measurements using a sector-field mass spectrometer revealed that fragment ions of SiF 4 as well as of B 2 H 6 are formed with significant excess kinetic energy.