Electron-impact ionization of SiCl, SiCl₂ and SiCl₄ molecules

Abstract

Abstract. Total ionization collision cross sections are calculated for silicon chloride compounds namely SiCl, SiCl 2 and SiCl 4 applying binary -encounter -Bethe (BEB) and modified BEB model for projectile energy from the ionization threshold to 1000 eV. The total ionization cross sections obtained using the binary-encounter-Bethe (BEB) model and the modified BEB model are compared with experimental and theoretical results. This model has been found to be successful for a wide range of molecules but for silicon chloride molecules the results are not in good agreement with experimental data.

Mass Spectrometric Study on the Combustion of Tetramethylsilane and the Formation of Silicon Oxide Clusters in Premixed Laminar Low-Pressure Synthesis Flames

“…The cross sections at 70 eV of the species of interest here are not available, so that the scaling step had to be omitted in this work. Based on the only cross sections that have been reported in the literature for silicon containing species, e.g., SiH 4 , Si 2 H 6 , Si­(CH 3 ) 4 , SiO, and SiO 2 , , we assume that this omission will not greatly increase the inaccuracy of the method because they vary by less than 30% at 17 eV. Ionization energies are needed to shift the ionization cross section curves appropriately. They were calculated in this work by quantum chemical calculations for the most important intermediates of interest: SiO 2 , Si­(OH) 4 , Si­(CH 3 ) 2 OH, Si­(CH 3 )­(OH) 2 , and Si­(OH) 3 .…”

“…gas flow, pressure, and ionization energy, are compensated and only the uncertainties of the cross sections have a significant influence on the absolute uncertainties of the mole fractions. The error in the cross sections is usually under ±50%. , The error for experimentally determined calibration factors is expected to be 15%. For intermediate species calibrated by the modified RICS method the absolute uncertainty of the mole fractions is between 30–60%.…”