Electron impact cross-sections of tetraethyl silicate

Abstract

The understanding of electron interactions with molecules in plasma is of vital importance from academic and technological point of view. The reliable electron collision data is required to model the electron and ion components of low-temperature and non-equilibrium plasmas. Various electron impact cross-sections like the differential, integral, momentum transfer, partial and total ionizations are reported for tetraethyl silicate (TEOS), a plasma relevant molecule in the energy range between ionization threshold and 5~keV. The elastic (differential, integral and momentum transfer) cross-sections are obtained by invoking the molecular approach and local potential approximation within the single center expansion formalism. The dissociative ionization cross-sections are reported with in the binary-encounter-Bethe (BEB) model formalism. The elastic and ionization cross-sections are summed incoherently to estimate total cross-sections. A good agreement is observed between the present and available results. This work validates the efficacy of the modified-BEB model in computing the partial ionization cross-sections.

Research and application of plasma characteristic models for pulsed laser processing of metal materials

“…The complex plasma formation mechanism during the interaction of a high-energy pulsed laser with metal materials has been extensively investigated by scholars. Luthra et al 1 reported various electron impact cross sections, modified the binary encounter Bethe model, and validated the efficacy of the modified model in computing the partial ionization cross sections. Hoffmeister et al 2 considered the photoionization generated in a system composed of two atoms of different species by a laser field and showed that when the intensity of the laser field is increased, the photoionization process can acquire qualitatively new features in terms of the time evolution and electron emission spectra.…”