Electron field emission display based on AIC-PECVD thin silicon films

Shamim, Mohammed Zubair M.; Persheyev, Saydulla; Rose, M. J.

doi:10.1109/isco.2016.7727068

Cited by 1 publication

(1 citation statement)

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“…Hence the use of silicon as cold cathode field emitters leads towards the possibility of making commercially viable FED's [9]. Preliminary research in using pulsed excimer laser annealed planar silicon cold cathode emitters has shown that silicon has the potential to become the desired material for FED's [11][12][13][14][15][16]. Pulsed excimer laser crystallization (ELC) is also well known in the manufacturing world to produce crystalline silicon for use in electronics and active-matrix flat panel displays and other sensor technologies in the industry [17][18][19].…”

Section: Introductionmentioning

confidence: 99%

Micro-Nano Fabrication of Self-Aligned Silicon Electron Field Emitter Arrays Using Pulsed KrF Laser Irradiation

Shamim

Persheyev

Zaidi

et al. 2020

Integrated Ferroelectrics

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Self-aligned silicon micro-nano structured electron field emitter arrays were fabricated using pulsed krypton fluoride (KrF) excimer laser crystallization (ELC) of hydrogenated amorphous thin silicon films (a-Si:H) on metal coated backplane samples using well established manufacturing techniques. We investigate the effect of laser beam profile, laser pulse frequency and sample stage scanning speed on the growth of micro-nano conical structures on the surface of the thin silicon films. Randomly oriented conical structures as high as 1 µm were fabricated using laser scan frequency of 100 Hz and sample stage scanning speed of 0.25 mm/sec. Best field emission (FE) results were measured from samples with the highest surface features. FE currents in the order of 10 -6 A and low turn-on emission threshold of ~ 14 V/µm. Light emission from the prototype demonstrators was tested using bespoke driver electronics and planar anodes coated with indium tin-oxide (ITO) and low voltage FE phosphors, to exemplify their usage as cold-cathode emitters for future flat panel display technologies.

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