Electron Energy Distribution Function Measurements in an Inductively Driven Tandem Plasma Source

Tsankov, Tsanko Vaskov; Kiss’ovski, Zh; Djermanova, Nina; Kolev, St

doi:10.1002/ppap.200500092

Cited by 13 publications

(4 citation statements)

References 11 publications

(21 reference statements)

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“…As various properties of plasma depends on different part of (EEDFs) such as diffusion coefficient depends on the bulk of the (EEDFs) and ionization or excitation rates depend on the tail of the (EEDFs), the determination of the whole distribution is compelling for a comprehensive characterization of a plasma [16]. Measurements of the (EEDFs) are important in determining the plasma parameters and for optimizing the processes used for various applications [17]. Electron energy distribution function (EEDFs) plays an important role in plasma modeling.…”

Section: Resultsmentioning

confidence: 99%

Effect of Pressure and Hot Filament Cathode on Some Plasma Parameters of Hollow Anode Argon Glow Discharge Plasma

Al-Hakary¹

2016

AJMP

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The present study represents a review article and a complementary study to a published paper of direct current hot cathode and hollow anode argon glow discharge plasma at different pressures in the range 0.05-0.8 mbar. The glow discharge usually obtained by applying a high voltage between the electrodes sufficient to occurring breakdown of argon gas and sustaining the discharge. Additional estimation of some plasma parameters, ion temperature, degree of ionization and electron energy distribution function as well as some characteristics of glow discharge under the influence of pressure and filament current has been done. Plasma parameters have been calculated using single probe method at fixed discharge current I d =1.88mA and diameter of hollow anode. Furthermore a computer MATLAB program is applied for this purpose. Results show that the average discharge voltage increases while its average discharge current decreases according to the increasing of the filament current. On the Contrary the average discharge voltage decrease nearly exponentially whiles its average discharge current increases according to increasing of the gas pressure. Degree of ionization starts to increase from low pressure to medium and then tends to decrease toward high pressure investigated. However it starts to increase to maximum value at filament current 0.9A then tends to decrease at higher current and low pressure. While for high pressures there is no significance change. Ion temperature increases slowly with filament current up to 0.9A and then sharply increases to maximum value at 1.5A. But it decreases for pressures in the range 0.05-0.09 mbar and then increases with gas pressure. Electron energy distribution function (EEDFs) decrease according to increases filament current, however, it starts to increase from low pressure to maximum value at medium pressure then tends to increase according to further increases of pressure.

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Section: Resultsmentioning

confidence: 99%

Effect of Pressure and Hot Filament Cathode on Some Plasma Parameters of Hollow Anode Argon Glow Discharge Plasma

Al-Hakary¹

2016

AJMP

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“…This is achieved by using the downstream chambers as plasma diffusion volumes (similarly to double-plasma and grid-filtered systems [30][31][32], such that two plasmas separated by the extraction system are formed. The primary ICP is a plasma with relatively high temperature and high density while the diffused and expanded plasma in the downstream volume has significantly lower electron temperature T e and plasma density n e .…”

Section: The Experimental Conditions and Diagnosticsmentioning

confidence: 99%

Magnetized retarding field energy analyzer measuring the particle flux and ion energy distribution of both positive and negative ions

Rafalskyi

Dudin

Aanesland

2015

Review of Scientific Instruments

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This paper presents the development of a magnetized retarding field energy analyzer (MRFEA) used for positive and negative ion analysis. The two-stage analyzer combines a magnetic electron barrier and an electrostatic ion energy barrier allowing both positive and negative ions to be analyzed without the influence of electrons (co-extracted or created downstream). An optimal design of the MRFEA for ion-ion beams has been achieved by a comparative study of three different MRFEA configurations, and from this, scaling laws of an optimal magnetic field strength and topology have been deduced. The optimal design consists of a uniform magnetic field barrier created in a rectangular channel and an electrostatic barrier consisting of a single grid and a collector placed behind the magnetic field. The magnetic barrier alone provides an electron suppression ratio inside the analyzer of up to 6000, while keeping the ion energy resolution below 5 eV. The effective ion transparency combining the magnetic and electrostatic sections of the MRFEA is measured as a function of the ion energy. It is found that the ion transparency of the magnetic barrier increases almost linearly with increasing ion energy in the low-energy range (below 200 eV) and saturates at high ion energies. The ion transparency of the electrostatic section is almost constant and close to the optical transparency of the entrance grid. We show here that the MRFEA can provide both accurate ion flux and ion energy distribution measurements in various experimental setups with ion beams or plasmas run at low pressure and with ion energies above 10 eV.

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“…The obtained numerical solutions of the set of equations ( 2)-( 4) and ( 9), with the above given boundary conditions, are for the spatial structure of the discharge in the source given in figure 1. The size of the source is the same as that of the discharge vessel at the experimental set-up [22,[24][25][26][27] constructed with regard to small-scale experiments on hydrogen discharges as sources of negative hydrogen ions: radius R 1 = 2.25 cm and length L 1 = 30 cm of the first chamber, where the driver region is located, and, respectively, R 2 = 11 cm and L 2 = 47 cm of the second chamber, which provides the large volume for plasma expansion from the driver.…”

Section: Formulation Of the Problem Initial Set Of Equations And Gas ...mentioning

confidence: 99%

Two-dimensional fluid model of a two-chamber plasma source

Kolev

Shivarova

Tarnev

et al. 2008

Plasma Sources Sci. Technol.

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This study presents a two-dimensional fluid-plasma model developed for describing the cw regime operation of a tandem plasma source, consisting of a driver and an expansion plasma volume of different sizes. The moderate pressure range considered (tens to hundreds of milliTorr) allows a description within the drift-diffusion approximation, as employed in the model. Argon discharges maintained in a metal gas-discharge vessel are treated. The discussions stress charged-particle and electron-energy fluxes as well as the spatial distribution of their components. The main conclusions are for (i) different electron and ion fluxes resulting in a net current in the discharge; (ii) a radial ion flux prevailing over the axial one and an axial electron flux prevailing over the radial one; (iii) ion motion determined by the dc electric field and drift-diffusion electron motion influenced by thermal diffusion; (iv) plasma maintenance in the expansion plasma chamber due to charged-particle and electron-energy fluxes from the driver; (v) importance of the convective flux in the electron-energy balance; (vi) electron-energy losses for sustaining the dc electric field in the expansion plasma volume strongly predominating over the losses through collisions and (vii) electron cooling accompanied by a strong drop in the plasma density and in the potential of the dc electric field, due to the plasma expansion in a bigger volume. In general, the results show that the gas pressure range usually considered to be governed by ambipolar diffusion shows up in a different regime: a regime with a dc current, when the discharge is in a metal chamber with different dimensions in the transverse and longitudinal directions.

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Electron Energy Distribution Function Measurements in an Inductively Driven Tandem Plasma Source

Cited by 13 publications

References 11 publications

Effect of Pressure and Hot Filament Cathode on Some Plasma Parameters of Hollow Anode Argon Glow Discharge Plasma

Effect of Pressure and Hot Filament Cathode on Some Plasma Parameters of Hollow Anode Argon Glow Discharge Plasma

Magnetized retarding field energy analyzer measuring the particle flux and ion energy distribution of both positive and negative ions

Two-dimensional fluid model of a two-chamber plasma source

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