Electron energy distribution function in a dc magnetron sputtering discharge

Ivanov, Ivan P.; Statev, Sv.; Orlinov, V.; Shkevov, Rumen

doi:10.1016/0042-207x(92)90148-p

Cited by 24 publications

(9 citation statements)

References 17 publications

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“…The plasma density n e was calculated using the electron temperature and the ion saturation current. For these calculations we assumed a Maxwellian electron energy distribution function (EEDF), which has been shown to be valid in DCMS for total gas pressures above ∼1 Pa [22]. The recorded EEDF:s for the different discharges support this assumption.…”

Section: The Transient Calorimetric Probementioning

confidence: 94%

On the Impact of Electron Temperature in Magnetron Sputtering Benchmarked with Energy Flux Measurements

Haase

Lundin

Bornholdt

et al. 2015

Contrib. Plasma Phys.

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In this work we have investigated the effect of increasing the electron energy as a way to increase the ionization probability of the sputtered metal (Ti) by measuring the impact of three different process gases (Ne, Ar, and Kr). Using a combined Langmuir and calorimetric probe we were able to compare the electron density n e, the electron temperature Te, the total energy influx, as well as the different energy flux contributions from charge carriers, neutrals and surface processes for various discharge conditions. The results show that the electron temperature can be increased by up to a factor of 3 by using Ne instead of Ar (or Kr). Furthermore, it was also found that by using Ne the mean free path for electron impact ionization was decreased by at least 50 %, and for higher pressures even more. In addition, we show that the contributions from sputtered neutrals and film formation represent a large fraction of the total energy influx, whereas the energy flux from ions is very low due to low ne in this type of discharge. However, by investigating changes in the electron energy flux, it was possible to study the effects of using Ne. These results may provide a way to tune the degree of ionization in sputtering processes.

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Section: The Transient Calorimetric Probementioning

confidence: 94%

On the Impact of Electron Temperature in Magnetron Sputtering Benchmarked with Energy Flux Measurements

Haase

Lundin

Bornholdt

et al. 2015

Contrib. Plasma Phys.

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show abstract

“…In addition, and due to the higher cross section for electron impact ionization over electron impact dissociation (Mao et al 2008), chemical reactions involving cations such as C 2 + H 2 and C 2 H + might take place. However, the electron temperature of the plasma in magnetron sputtering discharges and in SGASs is lower than 10 eV (Ivanov et al 1992;Kousal et al 2017), which favors electron impact dissociation over direct ionization or dissociative ionization events. This is different to the case of dusty plasmas in which apart from the neutral dissociative production of C 2 H, there is a higher probability for the formation of C 2 + H 2 (from C 2 H 2 ) and C 2 H + (from C 2 H) by electron knocking-off and dissociative ionization processes, respectively.…”

Section: Formation Of Polyacetylenic Chains (C 2n H 2 )mentioning

confidence: 99%

The Chemistry of Cosmic Dust Analogs from C, C₂, and C₂H₂ in C-rich Circumstellar Envelopes

Santoro

Martínez

Lauwaet

et al. 2020

ApJ

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Interstellar carbonaceous dust is mainly formed in the innermost regions of circumstellar envelopes around carbonrich asymptotic giant branch stars (AGBs). In these highly chemically stratified regions, atomic and diatomic carbon, along with acetylene, are the most abundant species after H 2 and CO. In a previous study, we addressed the chemistry of carbon (C and C 2 ) with H 2 showing that acetylene and aliphatic species form efficiently in the dust formation region of carbon-rich AGBs whereas aromatics do not. Still, acetylene is known to be a key ingredient in the formation of linear polyacetylenic chains, benzene, and polycyclic aromatic hydrocarbons (PAHs), as shown by previous experiments. However, these experiments have not considered the chemistry of carbon (C and C 2 ) with C 2 H 2 . In this work, by employing a sufficient amount of acetylene, we investigate its gas-phase interaction with atomic and diatomic carbon. We show that the chemistry involved produces linear polyacetylenic chains, benzene, and other PAHs, which are observed with high abundances in the early evolutionary phase of planetary nebulae. More importantly, we have found a nonnegligible amount of pure and hydrogenated carbon clusters as well as aromatics with aliphatic substitutions, both being a direct consequence of the addition of atomic carbon. The incorporation of alkyl substituents into aromatics can be rationalized by a mechanism involving hydrogen abstraction followed by methyl addition. All the species detected in the gas phase are incorporated into nanometricsized dust analogs, which consist of a complex mixture of sp, sp 2 , and sp 3 hydrocarbons with amorphous morphology.

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“…the electron temperature of the plasma in magnetron sputtering discharges and in SGAS sources is lower than 10 eV (Ivanov et al 1992;Kousal et al 2017), which favours electron impact dissociation over direct ionization or dissociative ionization events. This is different to the case of dusty plasmas in which apart from the neutral dissociative production of C 2 H, there is a higher probability for the formation of C 2 H + 2 (from C 2 H 2 ) and C 2 H + (from C 2 H) by electron-knocking off and dissociative ionization processes, respectively.…”

Section: Composition Of the Dust Analoguesmentioning

confidence: 99%

The chemistry of cosmic dust analogues from C, C$_2$, and C$_2$H$_2$ in C-rich circumstellar envelopes

Santoro,

Martínez,

Lauwaet

et al. 2020

Preprint

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Interstellar carbonaceous dust is mainly formed in the innermost regions of circumstellar envelopes around carbon-rich asymptotic giant branch (AGB) stars. In these highly chemically stratified regions, atomic and diatomic carbon, along with acetylene are the most abundant species after H 2 and CO. In a previous study, we addressed the chemistry of carbon (C and C 2 ) with H 2 showing that acetylene and aliphatic species form efficiently in the dust formation region of carbon-rich AGBs whereas aromatics do not. Still, acetylene is known to be a key ingredient in the formation of linear polyacetylenic chains, benzene and polycyclic aromatic hydrocarbons (PAHs), as shown by previous experiments. However, these experiments have not considered the chemistry of carbon (C and C 2 ) with C 2 H 2 .In this work, by employing a sufficient amount of acetylene, we investigate its gas-phase interaction with atomic and diatomic carbon. We show that the chemistry involved produces linear polyacetylenic chains, benzene and other PAHs, which are observed with high abundances in the early evolutionary phase of planetary nebulae. More importantly, we have found a non-negligible amount of pure and hydrogenated carbon clusters as well as aromatics with aliphatic substitutions, both being a direct consequence of the addition of atomic carbon. The incorporation of alkyl substituents into aromatics can be rationalized by a mechanism involving hydrogen abstraction followed by methyl addition. All the species detected in gas phase are incorporated into the nanometric sized dust analogues, which consist of a complex mixture of sp, sp 2 and sp 3 hydrocarbons with amorphous morphology.

show abstract

Electron energy distribution function in a dc magnetron sputtering discharge

Cited by 24 publications

References 17 publications

On the Impact of Electron Temperature in Magnetron Sputtering Benchmarked with Energy Flux Measurements

On the Impact of Electron Temperature in Magnetron Sputtering Benchmarked with Energy Flux Measurements

The Chemistry of Cosmic Dust Analogs from C, C₂, and C₂H₂ in C-rich Circumstellar Envelopes

The chemistry of cosmic dust analogues from C, C$_2$, and C$_2$H$_2$ in C-rich circumstellar envelopes

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Electron energy distribution function in a dc magnetron sputtering discharge

Cited by 24 publications

References 17 publications

On the Impact of Electron Temperature in Magnetron Sputtering Benchmarked with Energy Flux Measurements

On the Impact of Electron Temperature in Magnetron Sputtering Benchmarked with Energy Flux Measurements

The Chemistry of Cosmic Dust Analogs from C, C2, and C2H2 in C-rich Circumstellar Envelopes

The chemistry of cosmic dust analogues from C, C$_2$, and C$_2$H$_2$ in C-rich circumstellar envelopes

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Product

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The Chemistry of Cosmic Dust Analogs from C, C₂, and C₂H₂ in C-rich Circumstellar Envelopes