Electron-drift velocity determination in CF₄and SF₆in a strong electric field from breakdown curves of low-pressure RF discharge

Abstract

In this paper we report the values of the electron-drift velocity in CF 4 and SF 6 within the range E/p ≈ 200-1000 V cm −1 Torr −1 . We have used the recorded coordinates of the turning point on the breakdown curves of the rf capacitive discharge. We have also formulated the main requirements to the experimental device for correct recording of the breakdown curves of the low-pressure rf capacitive discharge. Our data are in good agreement with those of other authors who have used different approaches. We have also obtained the results on the electron-drift-velocity values within the E/p region where no other techniques are applicable. Our findings are also supported by numerical simulation data obtained with the application of a conventional Bolsig code.

Electron drift velocity in N2O in strong electric fields determined from rf breakdown curves

“…The same equation was derived previously for the collisional regime (ν en ω) [21][22][23][24][25]. Here we show that the same equation is valid for all values of ν en and ω.…”

“…However, these only work for comparatively small reduced fields, E/p, because at higher values a self-sustaining discharge is ignited which impedes the measurement. Lisovskiy and co-workers [21][22][23][24] have used a novel method to determine the electron drift velocity from the location of the turning point in the breakdown curves of rf capacitive discharges. In addition Lisovskiy et al [25] proposed a new technique for determining V dr from the location of the minimum in the rf breakdown curve and applied it to argon, ammonia, nitrogen, hydrogen and oxygen.…”

A technique for evaluating the RF voltage across the electrodes of a capacitively-coupled plasma reactor

“…As is known [9][10][11][12][13][14][15][16], in the low-pressure range to the left of the breakdown-curve minimum of the RF discharge one observes a region of multivalued dependence of the RF breakdown voltage U rf on the gas pressure p. Figure 4 depicts the breakdown curve and the coordinates of the turning point for a spacing of 2.3 cm (at the pressure value p = p t and the rf voltage value U rf = U t ). At the turning point, the amplitude A of the electron displacement is equal to one-half of the inter-electrode gap [14][15][16].…”

“…The electron drift velocity can be determined, as a function of reduced electric field, from the coordinates of the turning point on the measured breakdown curves of a capacitive RF discharge [9][10][11][12][13][14][15]. As is known [9][10][11][12][13][14][15][16], in the low-pressure range to the left of the breakdown-curve minimum of the RF discharge one observes a region of multivalued dependence of the RF breakdown voltage U rf on the gas pressure p. Figure 4 depicts the breakdown curve and the coordinates of the turning point for a spacing of 2.3 cm (at the pressure value p = p t and the rf voltage value U rf = U t ).…”

“…The authors of papers [9][10][11][12][13][14][15] proposed a novel method for determining the electron drift velocity V dr in a gas, as a function of the reduced electric field, from the location of the low-pressure turning point in the breakdown curve of a low-pressure RF capacitive discharge. This method allows V dr to be determined for high electric fields, where other conventional techniques become difficult.…”