2002
DOI: 10.1063/1.1502915
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Electron diffraction and high-resolution transmission electron microscopy of the high temperature crystal structures of GexSb2Te3+x (x=1,2,3) phase change material

Abstract: Electron diffraction and high-resolution transmission electron microscopy of the high temperature crystal structures of GexSb2Te3+x (x=1,2,3) phase change material Kooi, B. J.; de Hosson, J. Th. M.

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Cited by 240 publications
(235 citation statements)
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“…An impressive achievement has been accomplished when it was realized that PCM memory cells based on superlattices (SLs), structures made of alternating GeTe and Sb 2 Te 3 layers, showed dramatically improved performance in terms of reduced switching energies with ultra-low energy consumption, enhanced write-erase cycle lifetimes, and faster switching speeds. [5][6][7] However, high-angle annular dark-field scanning transmission electron microscopy (HAADF-STEM) investigations carried out on molecular beam epitaxy (MBE) grown Sb 2 Te 3 /GeTe SLs 8 have shown that the constituting materials intermix at the interfaces, forming alternating layers of Sb 2 Te 3 and natural Ge x Sb 2 Te 3+x (GST) 9 blocks with 7-to 15-atomic layers randomly distributed along the growth direction. Such phenomenon, explained in terms of the different bonding dimensionality of GeTe and Sb 2 Te 3 , is thermodynamically driven and therefore it cannot be easily controlled during the growth.…”
Section: © 2017 Author(s) All Article Content Except Where Otherwismentioning
confidence: 99%
“…An impressive achievement has been accomplished when it was realized that PCM memory cells based on superlattices (SLs), structures made of alternating GeTe and Sb 2 Te 3 layers, showed dramatically improved performance in terms of reduced switching energies with ultra-low energy consumption, enhanced write-erase cycle lifetimes, and faster switching speeds. [5][6][7] However, high-angle annular dark-field scanning transmission electron microscopy (HAADF-STEM) investigations carried out on molecular beam epitaxy (MBE) grown Sb 2 Te 3 /GeTe SLs 8 have shown that the constituting materials intermix at the interfaces, forming alternating layers of Sb 2 Te 3 and natural Ge x Sb 2 Te 3+x (GST) 9 blocks with 7-to 15-atomic layers randomly distributed along the growth direction. Such phenomenon, explained in terms of the different bonding dimensionality of GeTe and Sb 2 Te 3 , is thermodynamically driven and therefore it cannot be easily controlled during the growth.…”
Section: © 2017 Author(s) All Article Content Except Where Otherwismentioning
confidence: 99%
“…One distinction is that in s-GST, the intrinsic vacancies do not occupy lattice sites, but form vacancy planes perpendicular to the hexagonal ͓0001͔ direction and separate the building GST blocks. [23][24][25][26][27][28][29][30][31] Thus, the intrinsic vacancies are not randomly distributed in the lowest energy configurations. Calculations for a random distribution of the intrinsic vacancies in m-GST yield configurations with high energies ͑180-720 meV/f.u.͒, which will be more easily obtained from MD simulations compared to the ordered lowest energy configuration.…”
Section: A Metastable Gst Crystalline Phasementioning
confidence: 99%
“…Thus, three states can be distinguished in the writing and erasing processes, namely, crystalline, liquidlike, and amorphous ͑a-GST͒ phases. The GST compound, as well as other compositions, crystallizes in two well known phases, namely, the stable hexagonal [23][24][25][26][27][28][29][30][31] ͑s-GST͒ and metastable rocksalt ͑RS͒ ͑m-GST͒ phases. Experimental studies indicate that only the m-GST phase takes part in optical storage applications; 3,5,[10][11][12][13][14] however, both structures have very similar structure features as discussed by Da Silva et al 32 employing first-principles calculations.…”
Section: Introductionmentioning
confidence: 99%
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“…[17] Density functional theory calculations showed that the insulating state is caused by the localization of charge carriers in vacancy-rich areas, and the transition to the metallic state happens when vacancies reconfigure into ordered layers [18]. The presence of vacancy layers in the high temperature annealed phase of GSTs was proven by high-resolution TEM and electron diffraction [25].…”
Section: Introductionmentioning
confidence: 99%