Electron-beam lithography for polymer bioMEMS with submicron features

Scholten, Kee; Meng, Ellis

doi:10.1038/micronano.2016.53

Cited by 39 publications

(33 citation statements)

References 34 publications

(26 reference statements)

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“…Electron beam lithography is most compatible with patterning silicon or thin metal films that can dissipate the excess charge from the electrode beam ( Lee et al, 2007 ; Dalby et al, 2008 ; Scholten and Meng, 2016 ). Insulating films are more challenging to pattern with EBL because electrons that pass through the resist become trapped at the substrate surface, forming variations in resist surface potential.…”

Section: Technologies To Create Nano-architecturementioning

confidence: 99%

Nano-Architectural Approaches for Improved Intracortical Interface Technologies

et al. 2018

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Intracortical microelectrodes (IME) are neural devices that initially were designed to function as neuroscience tools to enable researchers to understand the nervous system. Over the years, technology that aids interfacing with the nervous system has allowed the ability to treat patients with a wide range of neurological injuries and diseases. Despite the substantial success that has been demonstrated using IME in neural interface applications, these implants eventually fail due to loss of quality recording signals. Recent strategies to improve interfacing with the nervous system have been inspired by methods that mimic the native tissue. This review focusses on one strategy in particular, nano-architecture, a term we introduce that encompasses the approach of roughening the surface of the implant. Various nano-architecture approaches have been hypothesized to improve the biocompatibility of IMEs, enhance the recording quality, and increase the longevity of the implant. This review will begin by introducing IME technology and discuss the challenges facing the clinical deployment of IME technology. The biological inspiration of nano-architecture approaches will be explained as well as leading fabrication methods used to create nano-architecture and their limitations. A review of the effects of nano-architecture surfaces on neural cells will be examined, depicting the various cellular responses to these modified surfaces in both in vitro and pre-clinical models. The proposed mechanism elucidating the ability of nano-architectures to influence cellular phenotype will be considered. Finally, the frontiers of next generation nano-architecture IMEs will be identified, with perspective given on the future impact of this interfacing approach.

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Section: Technologies To Create Nano-architecturementioning

confidence: 99%

Nano-Architectural Approaches for Improved Intracortical Interface Technologies

et al. 2018

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“…[85] Electron-beam lithography has been proven successful in the creation of well-defined nanopatterns via local modification of hydrophobicity or functionality of the polymer surfaces. [86,87] Polymer exposure to a focused e-beam enables the creation of protein-and cell-adhesive regions with sub-100 nm resolution. [88] In contrast to the above-mentioned techniques, e-beam lithography can pattern features with arbitrary shape.…”

Section: Amorphous Polymersmentioning

confidence: 99%

Controlling Protein Adsorption through Nanostructured Polymeric Surfaces

Firkowska‐Boden

Zhang

Jandt

2017

Adv Healthcare Materials

105

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The initial host response to healthcare materials' surfaces after implantation is the adsorption of proteins from blood and interstitial fluids. This adsorbed protein layer modulates the biological/cellular responses to healthcare materials. This stresses the significance of the surface protein assembly for the biocompatibility and functionality of biomaterials and necessitates a profound fundamental understanding of the capability to control protein–surface interactions. This review, therefore, addresses this by systematically analyzing and discussing strategies to control protein adsorption on polymeric healthcare materials through the introduction of specific surface nanostructures. Relevant proteins, healthcare materials' surface properties, clinical applications of polymer healthcare materials, fabrication methods for nanostructured polymer surfaces, amorphous, semicrystalline and block copolymers are considered with a special emphasis on the topographical control of protein adsorption. The review shows that nanostructured polymer surfaces are powerful tools to control the amount, orientation, and order of adsorbed protein layers. It also shows that the understanding of the biological responses to such ordered protein adsorption is still in its infancy, yet it has immense potential for future healthcare materials. The review, which is—as far as it is known—the first one discussing protein adsorption on nanostructured polymer surfaces, concludes with highlighting important current research questions.

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“…A proximity mode inclined lithography process has been discussed where a certain gap in between the mask and the substrate is maintained and it can be used for both front side exposure and backside exposure [4]. For some Bio-MEMS applications, electron beam lithography (EBL) has been used which is able to get sub-micron feature sizes [5]. A method of multi-beam interference for fabricating 3D polymeric microstructures has also been discussed [6].…”

Section: Introductionmentioning

confidence: 99%

3D Microlithography Using an Integrated System of 5-mm UV-LEDs with a Tilt-Rotational Sample Holder

et al. 2020

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This paper demonstrates a 3D microlithography system where an array of 5 mm Ultra Violet-Light Emitting Diode (UV-LED) acts as a light source. The unit of the light source is a UV-LED, which comes with a length of about 8.9 mm and a diameter of 5 mm. The whole light source comprises 20 × 20 matrix of such 5 mm UV-LEDs giving a total number of 400 LEDs which makes it a very favorable source with a large area for having a batch production of the desired microstructures. This light source is able to give a level of precision in microfabrication which cannot be obtained using commercial 3D printers. The whole light source performs continuous rotational movement once it is turned on. This can also move up and down in a vertical direction. This multidirectional light source also comprises a multidirectional sample holder. The light source teaming up with the multidirectional sample holder highly facilitates the process of fabrication of a huge range of 3D structures. This article also describes the different levels of characterization of the system and demonstrates several fabricated 3D microstructures including high aspect ratio vertical micro towers, twisted turbine structures, triangles, inclined pillar ‘V’ structures, and hollow horn structures as well.

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Electron-beam lithography for polymer bioMEMS with submicron features

Cited by 39 publications

References 34 publications

Nano-Architectural Approaches for Improved Intracortical Interface Technologies

Nano-Architectural Approaches for Improved Intracortical Interface Technologies

Controlling Protein Adsorption through Nanostructured Polymeric Surfaces

3D Microlithography Using an Integrated System of 5-mm UV-LEDs with a Tilt-Rotational Sample Holder

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