Abstract:Electrical transport through octadecyltrichlorosilane self-assembled monolayers sandwiched between a silicon substrate and an aluminum film was altered using electron-beams (e-beams) with different energies and doses. Under certain e-beam conditions, improvement of the dielectric performance was observed compared with the unmodified monolayers. This was ascribed to partial “healing” of the gauche defects within the alkyl chains under the electron flux. It was also possible to vary the barrier height between 2 … Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.