In the study of many molecular systems by means of electron-beam diagnostics (EBD) using the Muntz method [1], one observes differences from the optical model that show up at densities above 1.10 t5 particles/cm 3. It was found that these deviations may be due to the presence of secondary processes, nonlinear in pressure, in the excitation and deactivation of the molecules: multiquantum transitions [2], excitation by secondary electrons [3], fluorescence (possibly, selective) quenching during oscillations of excited ions with molecules of the background [4], etc. Therefore, use of the EBD method in the study of new molecular systems is impossible without the development of an adequate excitation-radiation model with a detailed analysis of the probable channels of population and emptying of the radiating states. Such a model becomes more complicated, the more complex the structure of the electronic states. An EBD method has now been developed, and models for the N 2, CO 2, CO, and HC1 molecules have been constructed [5][6][7][8].This paper presents the results of a study of the emission spectra of hydrogen fluoride excited by an electron beam, results obtained from constructing a model of the excitation-deactivation processes of HF + ion, and results of determination of the scope of applicability of the EBD technique to hydrogen fluoride mixtures. The spectra of HF are of major interest in connection with the extensive use of hydrogen halides as optical media for high-power chemical lasers.1. Let us examine the process of electron-impact excitation-radiation of HF. The radiation intensity of a rotational line is [9]