2015
DOI: 10.1088/0034-4885/79/1/016501
|View full text |Cite
|
Sign up to set email alerts
|

Electron beam damage in oxides: a review

Abstract: This review summarizes a variety of beam damage phenomena relating to oxides in (scanning) transmission electron microscopes, and underlines the shortcomings of currently popular mechanisms. These phenomena include mass loss, valence state reduction, phase decomposition, precipitation, gas bubble formation, phase transformation, amorphization and crystallization. Moreover, beam damage is also dependent on specimen thickness, specimen orientation, beam voltage, beam current density and beam size. This article i… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

4
242
0

Year Published

2016
2016
2021
2021

Publication Types

Select...
6
3

Relationship

1
8

Authors

Journals

citations
Cited by 231 publications
(262 citation statements)
references
References 212 publications
(410 reference statements)
4
242
0
Order By: Relevance
“…During these processes, beam damage can occur, in which the composition, oxidation state or bonding environment are changed during the measurement. 122,125 Figure 3. Common techniques for measuring composition, classified based on whether they are surface sensitive, measure the bulk of the film or either.…”
Section: Page 10 Of 39 Acs Paragon Plus Environment Chemistry Of Matementioning
confidence: 99%
See 1 more Smart Citation
“…During these processes, beam damage can occur, in which the composition, oxidation state or bonding environment are changed during the measurement. 122,125 Figure 3. Common techniques for measuring composition, classified based on whether they are surface sensitive, measure the bulk of the film or either.…”
Section: Page 10 Of 39 Acs Paragon Plus Environment Chemistry Of Matementioning
confidence: 99%
“…These 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 include controlling the acceleration voltage of the probe beam, reducing the flux of the beam by defocusing, reducing beam exposure time through rastering, using different particles for the probe beam, adjusting specimen orientation and thickness, or adjusting the wavelength of the probe beam. 117,120,122,125 In all cases, evidence should be given that the composition measurements are reflective of the original sample. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 ...…”
Section: Page 10 Of 39 Acs Paragon Plus Environment Chemistry Of Matementioning
confidence: 99%
“…High-energy electron beams, which are focused down to a spot that is several nanometers in size, may cause local heating, electrostatic charging, and material structural damage [32][33][34]; these alter the sample properties and may reduce the performance of the final device. The level of introduced defects depends on the beam energy, accumulated dose, and scattering cross-sections of the accelerated particles.…”
Section: Limits Of Materials Modification/damagementioning
confidence: 99%
“…Radiolytic damage originates from inelastic interactions between the incident beam and electrons within the specimen, in which the potential energy of an excited atomic state is converted into atomic displacement. A more complete discussion on damage mechanisms has been reviewed elsewhere [1-4]. …”
Section: Introductionmentioning
confidence: 99%