Electron beam column for in-line applications featuring enhanced imaging of high-aspect-ratio structures by selective detection of on-axis secondary electrons

Munack, H.; Koegler, Walter; Baumgarten, Holger; Ruebekohl, Christian; Adamec, P.; Degenhardt, Ralf; Feuerbaum, Hans Peter; Winkler, D.

doi:10.1117/12.346937

SPIE Proceedings

1999

DOI: 10.1117/12.346937

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Electron beam column for in-line applications featuring enhanced imaging of high-aspect-ratio structures by selective detection of on-axis secondary electrons

H. Munack

Walter Koegler

Holger Baumgarten

et al.

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Electron beam column for in-line applications featuring enhanced imaging of high-aspect-ratio structures by selective detection of on-axis secondary electrons

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