2017
DOI: 10.1134/s1063783417080212
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Electron-beam charging of dielectrics preirradiated with moderate-energy ions and electrons

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Cited by 17 publications
(4 citation statements)
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“…The assumptions put forward were confirmed by the experimentally observed fact that after preliminary irradiation of the samples with electrons and low-energy ions, the sapphire began to charge immediately after switching-on the electron irradiation [1,2], that can be explained by the fact that the preliminary irradiation creates radiation defects in the sample near-surface region, which intensively capture the injected electrons.…”
Section: Introductionmentioning
confidence: 79%
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“…The assumptions put forward were confirmed by the experimentally observed fact that after preliminary irradiation of the samples with electrons and low-energy ions, the sapphire began to charge immediately after switching-on the electron irradiation [1,2], that can be explained by the fact that the preliminary irradiation creates radiation defects in the sample near-surface region, which intensively capture the injected electrons.…”
Section: Introductionmentioning
confidence: 79%
“…In previous experiments [1][2][3] on the study of the kinetics of charging dielectric massive single-crystalline samples of sapphire and quartz, it was found that the surface potential of sapphire begins to grow only a few minutes after switching-on the electron irradiation. Moreover, the start time of sample charging depended both on the energy and on the current density of the irradiating electrons.…”
Section: Introductionmentioning
confidence: 98%
“…Charging of dielectric targets by electron irradiation is a well-known phenomenon which should be taken into account in studies of dielectric materials and coatings with electron microscopy, in electron beam lithography, in development of dielectric coatings for spacecrafts and in other fields of science and engineering. Most of the works reported so far dealt with measuring the potential of the charged surface which is mainly determined by the balance between the charge of the primary electrons penetrating into the material and the charge of the emitted secondary electrons [1][2][3][4][5][6][7][8][9]. It was shown however [10] that charging kinetics is strongly affected by the spatial distribution of the electrons and holes formed by irradiation.…”
Section: Introductionmentioning
confidence: 99%
“…Controlled charging of dielectric surfaces is also needed in laboratory studies of the materials charging by plasma direct impact [11,12], as well as in microcircuits and materials radiation tests [13,14].…”
Section: Introductionmentioning
confidence: 99%