1988
DOI: 10.1007/bf00615932
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Electron-active silicon oxidation

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Cited by 36 publications
(16 citation statements)
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“…Although experiments in [17] were done for a different sample material and at different experimental conditions, we note that same processes (e.g. electron attachment to oxygen [5]) may also activate the anode oxidation in our experiments.…”
Section: Resultsmentioning
confidence: 99%
“…Although experiments in [17] were done for a different sample material and at different experimental conditions, we note that same processes (e.g. electron attachment to oxygen [5]) may also activate the anode oxidation in our experiments.…”
Section: Resultsmentioning
confidence: 99%
“…It is well known that absorption of high-energy photons creates highly energetic electrons in the conduction band of the semiconductor, which can tunnel through the thin oxide layer and reach the surface, where they are captured by atomic oxygen. 23,24 However, this effect can only explain the enhancement of the semiconductor-oxidation rate. The trapping of Ge during SiGe-oxidation experiments has been explained by a competition between the oxidant flux from the surface and the Si atoms flux from the substrate: 5,6,[9][10][11][12] as long as the flux of Si atoms is equal or greater than the oxidant flux, the grown oxide layer will contain only SiO 2 , while all Ge atoms will be segregated from this newly formed oxide layer.…”
Section: Resultsmentioning
confidence: 97%
“…The oxidation of semiconductors under the above-band irradiation occurs according to the electron-active photooxidation model which suggests the dissociation of molecular oxygen into more active atomic oxygen under the influence of excited charge carriers of QDs [16, 17]. The effect of quantum dot photooxidation has been studied mostly on the CdSe nanocrystals.…”
Section: Introductionmentioning
confidence: 99%