Abstract. Influence of stationary spatially-homogeneous Townsend discharge on the (100) surface of semi-insulating GaAs samples is studied. Samples exposed to both electrons and ions in nitrogen discharge at the current density j=60 µA/cm 2 are studied by means of X-ray photoelectron spectroscopy, ellipsometry and atomic force microscopy. It is shown that exposure to low-energy ions (< 1 eV) changes crystal structure of the semiconductor on the depth up to 10-20 nm, although the stoichiometric composition does not change. The exposure to low-energy electrons (< 10 eV) forms an oxide layer, which is 5-10 nm thick. Atomic force microscopy demonstrates that the change in the surface potential of the samples may exceed 100 mV, for the both discharge polarities, while the surface roughness does not increase.