Electromechanically coupled feedback loops for microsystems. application to volatile organic compounds (VOC) sensors

Rodriguez, A.; Amirola, J.; Millan, M.; Horrillo, M.C.; Sayago, I.; García, Miguel de Cara; Gutiérrez, Francisco Javier Sanza

doi:10.1109/icsens.2004.1426123

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“…These devices have been employed to measure VOCs concentrations employing two different low consumption working principles. Responses obtained with these devices are in the statcof-the-art in terms of sensitivity and response time [4].…”

Section: Discussionmentioning

confidence: 99%

Micromachined silicon microstructures for gas sensors

Amirola

Rodriguez

Castañer

et al.

Conference on Electron Devices, 2005 Spanish

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Devices studied in this work consist of monocrystalline Silicon micromachined cantilevers, obtained through the bulk micromachining of a BESOl (Back Etch Silicon On Insulator) wafer. Cantilevers are functionalized by means of a sensitive polymer layer. These devices have been employed in the detection of Volatile Organic Compounds (VOCs) through different transduction principles. State-of-thc-art sensitivities have been obtained.

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Section: Discussionmentioning

confidence: 99%