2013
DOI: 10.1021/nl401352k
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Electromechanical Piezoresistive Sensing in Suspended Graphene Membranes

Abstract: Monolayer graphene exhibits exceptional electronic and mechanical properties, making it a very promising material for nanoelectromechanical devices. Here, we conclusively demonstrate the piezoresistive effect in graphene in a nanoelectromechanical membrane configuration that provides direct electrical readout of pressure to strain transduction. This makes it highly relevant for an important class of nanoelectromechanical system (NEMS) transducers. This demonstration is consistent with our simulations and previ… Show more

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Cited by 350 publications
(374 citation statements)
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References 24 publications
(51 reference statements)
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“…1 In particular, graphene exhibits striking mechanical stiffness (with 1 TPa Young's modulus), ultrathin structure (down to a single atomic layer) and exceptional robustness (stretchable up to 20%), which make it an ideal platform for NEMS. [2][3][4][5][6][7][8] In the context of NEMS, electromechanical coupling is an important and highly desirable property. Among the various coupling methods, the piezoelectric effect, in which a material becomes electrically polarized under external strain, is the most popular method.…”
Section: Introductionmentioning
confidence: 99%
“…1 In particular, graphene exhibits striking mechanical stiffness (with 1 TPa Young's modulus), ultrathin structure (down to a single atomic layer) and exceptional robustness (stretchable up to 20%), which make it an ideal platform for NEMS. [2][3][4][5][6][7][8] In the context of NEMS, electromechanical coupling is an important and highly desirable property. Among the various coupling methods, the piezoelectric effect, in which a material becomes electrically polarized under external strain, is the most popular method.…”
Section: Introductionmentioning
confidence: 99%
“…Simultaneously, under tensile strain, monolayer WSe 2 remains a direct bandgap material with a bandgap decrease rate of $8 meV/% and multilayer WSe 2 undergoes an indirect to direct bandgap transition, 20 while monolayer MoS 2 shows a direct to indirect bandgap transition with a higher bandgap decrease rate of $45 meV/% (PL intensity decreases rapidly with strain). 21 Since the strain induced bandgap change will influence the resistivity of 2D materials, 22 the smaller rate of bandgap change under strain of 2D WSe 2 makes it a great contender for flexible electronic/optoelectronic device applications. Although a lot of research has been done to study the electrical and optical properties of the 2D TMDs, [23][24][25][26][27][28] the investigations relevant to quantifying their mechanical properties experimentally (MoS 2 29-31 and WS 2 31 ) are still quite few.…”
mentioning
confidence: 99%
“…This provides an access to intrinsic properties of graphene such as the intrinsic carrier mobility [1], mechanical strength [2] and thermal conductivity [3]. From the application point of view, multiple possible applications of suspended graphene have been proposed, among them are electromechanical resonators [4], electromechanical switchers [5], nanocantilever sensors [6], piezoresistive pressure sensors [7], capacitive pressure sensors [8], and capacitors with memory [9,10] (memcapacitors [11]) [39].…”
mentioning
confidence: 99%