Electromechanical Models of Micro- and Nanoresonators

Abstract

This work is devoted to numerical and partly experimental investigation of the electromechanical models of micro and nanoresonators. The main purpose of this resonators is detected the adherence of micro or nanoparticles and measurement its mass. The periodical oscillations of mono and many layers nanocapacitors, from which nanoresonator situated in electric field is constructed, are studied. The purpose of this work is creating of electromechanical models of MEMS and NEMS the aim of which is to identify the changes introduced into dynamic systems due to adhesion of micro or nanoparticles. It's significant to note that the time of overcharge of the nano-capacitor is much less, then the period of excited oscillations. This fact gives the possibility to apply asymptotic methods in numerical investigation. Physical experiments similar in model to the electromechanical nanoresonators were carried out. This work is an extended review article based on the results of previous our works.