Electromagnetic microrelays: concepts and fundamental characteristics

Hosaka, Hiroshi; Kuwano, Hiroki; Yanagiswa, K.

doi:10.1109/memsys.1993.296943

Cited by 40 publications

(11 citation statements)

References 5 publications

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“…An air gap of 250 microns readily withstands breakdown when subjected to greater than 2500 volts [ 6] Instead oflarge deflections, large contact forces can be generated which have been shown to minimize contac:t resistance [7]. Published research [8] and silver, contact forces between 100 µN and 1 mN are necessary to minimize contact resistance. Simultaneously, a stiffer magnetic plate can be employed to produce a device with faster switching time, higher g-force tolerance and greater contact break force.…”

Section: Relay Operationmentioning

confidence: 99%

Magnetostatic MEMS relays for the miniaturization of brushless DC motor controllers

Wright

Tai²

1999

Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Syst

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Magnetostatic MEMS relays which are capable of commutating the field windings of a DC brushless motor are presented. The commutation system based on these relays is less than 10% the mass and volume of the electronics it replaces, it eliminates all but two wires from the wiring harness, it requires no external control and it dissipates less than 1/1 OOOth the total motor power. Closure forces greater than 5 millinewton are generated in the relays providing four-wire contact resistance readings of less than 35 milliohms. Utilizing gold-to-gold contacts, hot switching of currents greater than 1 amp has been demonstrated. For lifetimes greater than 10 million cycles (greater than 50 hours of continuous motor operation), switched currents should be limited to less than 120 milliamp. At signal levels of less than 1 milliamp, no failure is seen after greater than half a billion cycles. No contact bounce is seen during make or break. Motor commutation in vacuum down to 5 microtorr and from room temperature down to-30 degrees celsius has been demonstrated.

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Section: Relay Operationmentioning

confidence: 99%

Magnetostatic MEMS relays for the miniaturization of brushless DC motor controllers

Wright

Tai²

1999

Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Syst

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“…The mandrel is used as a magnetic core, and magnet wires are either manually or automatically wound around it. Then the coil is inserted back into the magnetic actuator co-fabricated using LIGA [25].…”

Section: Fabrication Of Magnetic Actuatorsmentioning

confidence: 99%

Magnetic Microactuators

Tabib‐Azar

1998

Microactuators

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“…However, microactuators based on electromagnetic principle have been developed recently for various types of microsystems, mainly because of the progress in the process to deposit magnetic materials and coils on the silicon substrate [1]. For different actuation purpose, these electromagnetic microactuators have successfully applied to the micropump [2], microvalve [3], microrelay [4,5], micromotor [6], and other similar microactuators [7,8,9].…”

Section: Introductionmentioning

confidence: 99%

<title>Magnetic analysis of a micromachined magnetic actuator using the finite element method</title>

Yang

Chiou

et al. 1999

SPIE Proceedings

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In this paper, a parametrical method is developed to design a magnetic microactuator. The method is based on modeling the magnetic microactuator using the finite element analysis software that can be used to calculate the energy density and magnetic force. Here, the concept of design on experiments (DOE) is used to identify critical parameters that affect the performances of the electromagnetic microactuator. Numerical simulation results from a series of DOE have indicated that the dimension of core and the magnetic material block have the influence on planar electromagnetic actuators. When the length of the magnetic components is equal to that of outer diameter of coil circuit, we obtain the best efficiency in magnetic force. Furthermore, when we increase the thickness of the magnetic materials block or shorten the distance between the coils and magnetic material block, the magnetic force will increase dramatically. In addition, we can achieve a great magnetic force when the combination ratio of the length of the core is half of the magnetic material block. Simulation results have shown that electromagnetic actuators with high aspect ratio planar coil could sustain higher electrical current that consequently increases the magnetic force. During the realistic fabrication, the thick resist patterning and electroplating technologies is used to fabricate the above-mentioned electromagnetic microactuator.Experimental results indicated that the magnetic force follows closely to the simulation results.

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Electromagnetic microrelays: concepts and fundamental characteristics

Cited by 40 publications

References 5 publications

Magnetostatic MEMS relays for the miniaturization of brushless DC motor controllers

Magnetostatic MEMS relays for the miniaturization of brushless DC motor controllers

Magnetic Microactuators

<title>Magnetic analysis of a micromachined magnetic actuator using the finite element method</title>

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