2014 29th Symposium on Microelectronics Technology and Devices (SBMicro) 2014
DOI: 10.1109/sbmicro.2014.6940127
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Electrolyte-Insulator-Semiconductor field effect device for pH detecting

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Cited by 4 publications
(2 citation statements)
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“…EIS sensors have been developed in different biosensing applications in the environmental and pharmaceutical environments [9][10][11]. Several sensing metal oxide films are used for pH sensing applications, such as IGZO, ITO, Ta 2 O 5 , MgO, Al 2 O 3 /SiO 2 , TiO 2 , CuO, and ZnO [12][13][14][15][16][17][18][19]. The flat-band voltage of the EIS device changes depending on the ionic conditions of the tested solution.…”
Section: Introductionmentioning
confidence: 99%
“…EIS sensors have been developed in different biosensing applications in the environmental and pharmaceutical environments [9][10][11]. Several sensing metal oxide films are used for pH sensing applications, such as IGZO, ITO, Ta 2 O 5 , MgO, Al 2 O 3 /SiO 2 , TiO 2 , CuO, and ZnO [12][13][14][15][16][17][18][19]. The flat-band voltage of the EIS device changes depending on the ionic conditions of the tested solution.…”
Section: Introductionmentioning
confidence: 99%
“…In the last few decades the attention of the researchers has been resort to the electrolyte-insulatorsemiconductor (EIS), which has the same principle of operation as the ion-sensitive field effect transistors (ISFET), and its manufacturing process is simple and economic compared to the ISFET [1]. The structure and operation of EIS is similar to the MOS capacitor [2]. The chemical sensitivity mechanisms of the EIS system are related to the variation of the potential difference in the electrolyteinsulator interface because the change in the chemical composition of an analyte [3].…”
Section: Introductionmentioning
confidence: 99%