2009
DOI: 10.1016/j.electacta.2009.01.062
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Electroless deposition of NiWB alloy on p-type Si(100) for NiSi contact metallization

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Cited by 15 publications
(4 citation statements)
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“…In the case of experimental, unreplenished baths, the structure and the composition of the coating are not homogeneous over the coating thickness but change during the deposition, as was shown in the extreme case of a non-agitated bath by Rao et al [23]. However, the observation of the formation of nickel-boron deposits has not been studied extensively yet, opposite to the growth of nickel-phosphorous coatings that has been studied on various substrates with and without catalytic activation [17][18][19][20][21][22][24][25][26][27]. It is also well known by the electroless platers that the state of the substrate has a great influence not only on the plating process, but also on the coating properties [28,29]: surface roughness can for example affect the coating appearance.…”
Section: Introductionmentioning
confidence: 93%
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“…In the case of experimental, unreplenished baths, the structure and the composition of the coating are not homogeneous over the coating thickness but change during the deposition, as was shown in the extreme case of a non-agitated bath by Rao et al [23]. However, the observation of the formation of nickel-boron deposits has not been studied extensively yet, opposite to the growth of nickel-phosphorous coatings that has been studied on various substrates with and without catalytic activation [17][18][19][20][21][22][24][25][26][27]. It is also well known by the electroless platers that the state of the substrate has a great influence not only on the plating process, but also on the coating properties [28,29]: surface roughness can for example affect the coating appearance.…”
Section: Introductionmentioning
confidence: 93%
“…Either the substrate is spontaneously catalytic for the oxidation of the reducing agent, or it is more easily oxidizable than nickel, in which case a thin catalytic layer of nickel is spontaneously deposited, or finally it can be activated by dipping in a solution of catalytically active metal salts (like Pd) or by galvanic coupling [4]. The few studies dedicated to the initiation mechanism of electroless deposition focused on systems in which catalysts, such as Pd are used [17][18][19][20][21][22]. This means that if no catalyst is used, the actual mechanism that allows initial deposition on a determined substrate is rarely known and is at best proposed by assumptions.…”
Section: Introductionmentioning
confidence: 99%
“…The mechanism of electroless NiB has been studied by many researchers [18,19]. Nevertheless, the mechanism of formation of NiWB remains unclear.…”
Section: Niwb Electroless Platingmentioning
confidence: 99%
“…It is well known that annealing could enhance soft magnetic property in some cases [11]. However, for Ni-P coating on Si, many researchers reported that traditional annealing at high temperature may led to the reaction between Ni and Si and bring byproduct NiSi phase, which lead to the decrease of saturation magnetization [12,13]. We studied the effect of holding time during annealing on structure and magnetic properties of Ni-P film and found longer holding time would also bring some impurity phases, such as NiSi phase.…”
Section: Introductionmentioning
confidence: 98%