A micro total analytical system (μTAS) is a system that enhances the performance of a complete chemical analysis by minimizing the scale on which it is performed. The main advantages are automated analyses, higher speed and better separation performance as well as the ability to analyze extremely small (picoliter) sample volumes and reactions involving minute amounts of reagents. A complete analysis may involve taking a sample, its pretreatment and separation into its different components and their detection. In order to perform this sequence of functions, the sample is transported through microchannels that connect the various system parts performing these tasks, while the various (feedback) signals are transported through a separate microelectronic network. Examples of system parts in silicon, glass and polymers that perform tasks such as hydrodynamic and electroosmotic pumping, laminar and turbulent reagent mixing and (di)electrophoretic separations of DNA fragments and particles and cells are presented. Currently, μTAS are mainly being developed and used for remote environmental and process monitoring, patient monitoring and the analysis of nucleic acids. An integrated system in each of these areas is discussed.