Electroforming Processing for Nano/Micro Fabrication

Abstract

Electroforming is a highly specialized electrodeposition process for the manufacture of metal components. Based on a bottom-up approach, the process can accurately replicate the shape of a model, known in the industry as a mandrel.Taking advantage of this process, it has long been used for the reproduction of metal crafts.With the progress of semiconductor processing technology, it has become possible to manufacture mandrels with complex shapes in the nano-and micro-scales. As a result, metal structures with fi ne shapes can be obtained by electroforming using these advanced mandrels. This development trend has led to the emergence of various MEMS devices.To further improve the functionality of the device, it is necessary to develop a new electroforming process using metals with properties superior to those of conventional electroforming using copper or nickel.This article reviews the historical development of electroforming and MEMS, and also introduces several newly developed electroforming processes that demonstrate high functionality.