Electrodynamic Properties of Resonator Probes for Local Microwave Diagnostics of Nanoelectronic Objects

Abstract

The work focuses on detailing the distribution of the near evanescent field depending on the geometry of the aperture-forming region, the electrical properties of the objects under study, and assessing methods for scanning the properties of objects in depth. The results of a study of the electrodynamic properties of resonator probes with a coaxial aperture, developed for local microwave diagnostics of various objects, are presented. In particular, the influence of the size and shape of the tip and the tip-sample distance on the field distribution of a classical quarter-wave resonator measuring transducer is analyzed. Quantitative dependencies are presented that comprehensively characterize the probe-object system in terms of locality and sensitivity. Various options for changing the geometry of the probe aperture assembly are discussed to optimize the conversion characteristics of microwave sensors. The results of a study of the field distribution of a probe with tunable sensitivity by changing the position of the tip tip relative to the aperture plane are presented. The dependence of the field distribution on the tip displacement in such a probe has been established. Various variations of the operating modes of a probe with tunable sensitivity were studied: immersion of the tip into the probe aperture, extension of the tip into the interior of the object, extension of the probe tip from the aperture to the surface of the object.