Abstract:There have been increasing interests in lithium rechargeable batteries, especially microbatteries, with rapid development of portable electronic equipments and MEMS(Micro electromechanical systems) technology. In this work, lithium manganese oxide, as a strong candidate for the battery materials, which is more abundant, stable in ambient state and less toxic than the other oxides such as lithium nickel oxides and lithium cobalt oxides, was deposited by rf magnetron sputter. The effect of thermal treatment on t… Show more
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