2013
DOI: 10.1016/j.solmat.2013.03.035
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Electrochromism of DC magnetron sputtered TiO2 thin films: Role of deposition parameters

Abstract: We performed a comprehensive study on the electrochromism in TiO 2 thin films made by reactive DC magnetron sputtering and elucidated the roles of sputter gas pressure p, O 2 /Ar gas ratio γ and substrate temperature τ s . Good mid-luminous optical modulation-taken to be ~50 % in ~200-nm-thick films-was obtained under charge exchange in a Li + electrolyte for p > 15 mTorr and τ s < 100 °C, whereas γ was less important. The deposition rate dropped for increasing p, and hence p ≈ 15 mTorr was optimal. These film… Show more

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Cited by 46 publications
(15 citation statements)
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“…The work is an extension of recent studies on electrochromism in W oxide [34,35] and Ti oxide [36,37]. DektakXT instrument.…”
Section: Introductionmentioning
confidence: 98%
“…The work is an extension of recent studies on electrochromism in W oxide [34,35] and Ti oxide [36,37]. DektakXT instrument.…”
Section: Introductionmentioning
confidence: 98%
“…Anatase and rutile are employed in H 2 production, 6 are able to degrade both volatile organic compounds 7,8 and recalcitrant/persistent pollutants, 9 and are also reported to be active against several bacterial strains and yeasts. 10−12 TiO 2 has also been studied for its electrochromic behavior: 13,14 reversible and persistent changes in the optical properties can be obtained by charge insertion/extraction. 15 Recently, TiO 2 has been shown to possess a degree of photochromic behavior; photochromism can be defined as that phenomenon in which the material can change color in a reversible way by exposure to an electromagnetic radiation (UV, visible, and IR illumination).…”
Section: Introductionmentioning
confidence: 99%
“…TiO 2 ince filmler hazırlanırken RF saçtırma [20], ultrasonik sprey piroliz [21], kimyasal buhar depolama [22], darbeli lazer biriktirme [23], DC magnetron [24], sol-jel [25,26] gibi birçok ince film kaplama yöntemi kullanılmaktadır. Bu yöntemlerden biri olan sol-jel yöntemi, homojen yapı elde edilmesi, her aşamanın kontrol altında tutulabilmesi, basit cihazlar gerektirmesi ve düşük sıcaklıklarda uygulanabilir olması sebebiyle metal oksit kaplamalar hazırlamak için kullanışlı bir yöntemdir [27].…”
Section: Optical and Electrochromic Properties Of Tio2 Films Preparedunclassified